Metalorganic Vapor Phase Epitaxial Growth for High Electron Mobility Transistor LSIs
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1992-07-01
著者
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Ohori Tatsuya
Fujitsu Laboratories Ltd.
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Suzuki M
Shizuoka Univ. Hamamatsu
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KASAI Kazumi
Fujitsu Laboratories Ltd.
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KOMENO Junji
Fujitsu Laboratories Ltd.
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TOMESAKAI Nobuaki
Fujitsu Ltd.
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SUZUKI Masahisa
Fujitsu Ltd.
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Suzuki Mariko
Advanced Semiconductor Devices Research Laboratories R&d Center Toshiba Corporation
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Kasai K
Fujitsu Laboratories Ltd.
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Komeno J
Fujitsu Laboratories Ltd.
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Suzuki M
Department Of Electronics Graduate School Of Engineering Tohoku University
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