Conformal Deposition and Gap-Filling of Copper into Ultranarrow Patterns by Supercritical Fluid Deposition

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概要

• 論文の詳細を見る
• 2008-09-25

著者

• Kondoh Eiichi

  Department Of Mechanical System Engineering Faculty Of Engineering Yamanashi University

• Momose Takeshi

  Department Of Materials Engineering The University Of Tokyo

• Sugiyama Masakazu

  Institute Of Engineering Innovation The University Of Tokyo

• Shimogaki Yukihiro

  Department Of Materials Engineering Faculty Of Engineering Univerity Of Tokyo

• Sugiyama Masakazu

  Institute Of Engineering Innovation School Of Engineering The University Of Tokyo

• Kondoh Eiichi

  Department Of Mechanical System Engineering University Of Yamanashi

• Momose Takeshi

  Department of Material Engineering, The University of Tokyo, Bunkyo, Tokyo 163-8656, Japan

• SHIMOGAKI YUKIHIRO

  Department of Chemical Engineering, University of Tokyo

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