Physical and Chemical Contributions of Interfacial Impurities to Film Adhesion : Surfaces, Interfaces, and Films
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概要
- 論文の詳細を見る
Effects on adhesion strength of residual Cl and F impurities at the interface between a Cu film deposited by chemical vapor deposition and a TiN substrate were studied through experimental and computational methods. The adhesion strength of the Cu film on HCl treated TiN was enhanced compared with that on untreated TiN, whereas the adhesion strength on HF treated TiN was reduced. X-ray photoelectron spectroscopic (XPS) analysis of the near-interface region revealed that the adhesion differences in the presence or absence of the residual impurities were not due to the contribution of chemical interactions, but rather to physical contributions. Computational estimations suggest that incorporation of Cl in the TiN substrate improves the physical bonding strength by increasing the dispersion force.
- 社団法人応用物理学会の論文
- 2001-12-15
著者
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Kim Young
Department Of Agricultural Chemistry The University Of Tokyo
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Kim Young
Department Of Materials Engineering Faculty Of Engineering Univerity Of Tokyo
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Shimogaki Yukihiro
Department Of Materials Engineering Faculty Of Engineering Univerity Of Tokyo
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Shimogaki Yukihiro
Department of Electronic Engineering, University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113, Japan
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