Effects of NH_3 Plasma Treatment of the Substrate on Metal Organic Chemical Vapor Deposition of Copper Films
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1998-08-15
著者
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KIM Dong
Department of Environmental Medical Biology, Wonju College of Medicine, Yonsei University
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Kim Young
Department Of Electronics Engineering Korea Advance Intitute Of Science & Technology
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Min S‐k
Korea Univ. Chungnam Kor
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Min Suk-ki
School Of Electronics And Information Engineering Korea University
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Min Suk-ki
Semiconductor Mat. Lav.
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Jung D
Sungkyunkwan Univ. Suwon Kor
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Jung Donggeun
Department Of Physics Brain Korea 21 Physics Research Division Institute Of Basic Science And Center
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Jung Donggeun
Department Of Physics And Institute Of Basic Science Sungkyunkwan University
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Kim D
Semiconductor Materials Laboratory Korea Institute Of Science And Technology
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Kim Dong
Semiconductor Materials Research Center Korea Institute Of Science And Technology
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Kim Young
Department Of Agricultural Chemistry The University Of Tokyo
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Kim Young
Semiconductor Materials Research Center Korea Institute Of Science And Technology:department Of Phys
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Jung Donggeun
Department Of Physics Brain Korea 21 Physics Research Division And Institute Of Basic Science Sun Gl
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Kim Dong
Department Of Anatomy School Of Medicine Kyungpook National University
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Kim DongJoon
Department of Metallurgical Engineering, Hanyang University
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