Enhancement of the Programming Speed in SANOS Nonvolatile Memory Device Designed Utilizing Al_2O_3 and SiO_2 Stacked Tunneling Layers

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概要

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• The programming characteristics of polysilicon-aluminum oxide-nitride-oxide-silicon (SANOS) nonvolatile memory devices with Al2O3 and SiO2 stacked tunneling layers were investigated. The electron and hole drifts in the Si3N4 layer were calculated to determine the program speed of the proposed SANOS devices. Simulation results showed that enhancement of the programming speed in SANOS was achieved by utilizing SiO2 and Al2O3 stacked tunneling layers.

• 2010-05-01

著者

• KIM Dong

  Department of Environmental Medical Biology, Wonju College of Medicine, Yonsei University

• Kim Tae

  Department Of Materials Science And Engineering Korea Advanced Institute Of Science And Technology

• Kim Hyun

  Division Of Gastroenterology Department Of Internal Medicine Wonju Christian Hospital Yonsei Univers

• You Joo

  Department Of Electronics And Computer Engineering Hanyang University

• Kim Hyun

  Division Of Ceramics Korea Institute Of Science And Technology

• Kim Dong

  Department Of Electronics And Computer Engineering Hanyang University

• Kim Dong

  Department Of Anatomy School Of Medicine Kyungpook National University

• Kim Hyun

  Division Of Nanoscale Semiconductor Engineering Hanyang University

• Kim Tae

  Department Of Anesthesia And Pain Medicine School Of Medicine Pusan National University

• Kim Tae

  Department Of Electronics And Computer Engineering Hanyang University

• Kim Tae

  Department of Advanced Materials Engineering, Sungkyunkwan University, Suwon, Gyeonggi 440-746, Republic Korea

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