A Study of Sapphire Etching Characteristics Using BCl_3-based Inductively Coupled Plasmas
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2002-10-15
著者
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KIM Dong
Department of Environmental Medical Biology, Wonju College of Medicine, Yonsei University
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JEONG Chang
Department of Materials Science & Engineering, Sungkyunkwan University
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YEOM Geun
Department of Materials Science & Engineering, Sungkyunkwan University
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Jeong Chang
Sungkyunkwan Univ. Suwon Kor
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Kim Dong
Department Of Materials Engineering Sungkyunkwan University
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Kim K
Sungkyunkwan Univ. Suwon Kor
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Kim Kyong
Department Of Materials Engineering Sungkyunkwan University
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Yeom Geun
Department Of Materials Engineering. Sungkyunkwan University
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Kim Dong
Department Of Anatomy School Of Medicine Kyungpook National University
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Jeong Chang
Department Of Advanced Materials Science And Engineering Sungkyunkwan University
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Yeom Geun
Department Of Advanced Materials Science And Engineering Sungkyunkwan University
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Kim Kyong
Department Of Anesthesiology And Pain Medicine Himchan Hospital
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Yeom Geun
Department of Advanced Materials Engineering, Sungkyunkwan University, Suwon, Gyeonggi 440-746, Republic Korea
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Kim Kyong
Department of Advanced Materials Engineering, Sungkyunkwan University, Suwon, Gyeonggi 440-746, Republic Korea
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