Deposition of SiO_2 by Plasma Enhanced Chemical Vapor Deposition as the Diffusion Barrier to Polymer Substrates
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-02-15
著者
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CHO Nam
Department of Preventive Medicine, Ajou University School of Medicine
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Cho Nam
Department Of Materials Science & Engineering Sungkyunkwan University
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Yeom G
Sungkyunkwan Univ. Kyounggi Kor
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Yeom Geun
Sungkyunkwan Univ. Suwon Kor
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JEONG Chang
Department of Materials Science & Engineering, Sungkyunkwan University
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LEE June
Department of Materials Science & Engineering, Sungkyunkwan University
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LIM Jong
Department of Materials Science & Engineering, Sungkyunkwan University
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MOON Cheol
PDP Division, Samsung SDI Co., Ltd.
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YEOM Geun
Department of Materials Science & Engineering, Sungkyunkwan University
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Lee June
Department Of Advanced Materials Science And Engineering Sungkyunkwan University
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Jeong Chang
Sungkyunkwan Univ. Suwon Kor
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Lim Jong
Sungkyunkwan Univ. Suwon Kor
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Lee J
System Ic R&d Division Hynix Semiconductor Inc.
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