Formation of Thermally Stable AgCu-Based Reflectors by a Two Step Alloy Method for Vertical Light-Emitting Diodes
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概要
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Two-step alloyed indium–tin-oxide (ITO)/Ni/AgCu/Pt reflectors for high-performance GaN-based vertical light-emitting diodes (VLEDs) were investigated. The ITO layer was first annealed at 650 °C for 1 min in air to make an Ohmic contact and then the Ni/AgCu/Pt reflectors were deposited and subsequently annealed at 400 °C for 1 min in air to improve their reflectance and mechanical adhesion with the ITO layer. It was shown that the reflectance of the ITO/Ni/AgCu/Pt reflectors at 460 nm was slightly increased from 82 to 87% after two-step annealing. Based on the secondary ion mass spectrometry depth profiles, this improvement was attributed to the formation of a transparent Ni-oxide and the existence of Cu atoms near ITO/AgCu/Pt interface regions suppressing the inter and out-diffusion of Ag. The VLEDs fabricated with the ITO/Ni/AgCu/Pt reflectors showed an approximately 4.4% higher output power and much better current–voltage characteristics than those with the Ag-based reflectors.
- 2010-11-25
著者
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Lee June
Department Of Advanced Materials Science And Engineering Sungkyunkwan University
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Kim Seung
Korea Basic Science Institute
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Baek Jong
Korea Photonics Technology Institute
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JEONG Tak
Korea Photonics Technology Institute
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Lee Seung
Korea Atomic Energy Research Institute
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Lee Sang
Korea Advanced Institute Of Science And Technology
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Ju Jin
Korea Photonics Technology Institute, Gwangju 500-460, Korea
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Jeong Seong
Korea Photonics Technology Institute, Gwangju 500-460, Korea
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Lee Seung
Korea Photonics Technology Institute, Gwangju 500-460, Korea
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Lee June
Department of Materials Science and Engineering, Chonnam National University, Gwanju 500-757, Korea
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Baek Jong
Korea Photonics Technology Institute, Gwangju 500-460, Korea
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Kim Seung
Korea Photonics Technology Institute, Gwangju 500-460, Korea
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