Novel Internal Linear Inductively Coupled Plasma Source for Flat Panel Display Applications
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-11-30
著者
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Yeom G
Sungkyunkwan Univ. Kyounggi Kor
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YEOM Geun
Department of Materials Science & Engineering, Sungkyunkwan University
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Kim Kyong
Department Of Materials Engineering Sungkyunkwan University
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JUNG Seung
Department of Urology, Chonnam National University, Medical School
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