A 0.25-μm BiCMOS Technology Using SOR X-Ray Lithography (Special Issue on Quarter Micron Si Device and Process Technologies)

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A 0.25-μm BiCMOS technology has been developed using three sophisticated technologies; the HSST/ BiCMOS device, synchrotron orbital radiation (SOR) X-ray lithography, and an advanced two-level metallization. The HSST/BiCMOS provides a 25.4-ps double-poly bipolar device using High-performance Super Self-Aligned Process Technology (HSST), and a 42 ps/2 V CMOS inverter. SOR lithography allows a 0.18 μm gate and 0.2 μm via-hole patternings by using single-level resists. The metallization process features a new planarization technique of the 0.3-μm first wire, and a selective CVD aluminum plug for a 0.25 μm via-hole with contact resistance lower than 1Ω. These 0.25-μm technologies are used to successfully fabricate a 4 KG 0.25 μm CMOS gate-array LSI on a BiCMOS test chip of 12 mm square, which operates at 58 ps/G at 2 V. This result demonstrates that SOR lithography will pave the way for the fabrication of sub-0.25-μm BiCMOS ULSIs.
1994-03-25