Low Energy Focused Ion Beam System and Application to Low Damage Microprocess : Etching and Deposition Technology
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1991-01-31
著者
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NAMBA Susumu
Department of Electrical Engineering, Faculty of Engineering Science, Osaka University
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Namba S
Japan Atomic Energy Res. Inst. Kyoto Jpn
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Namba S
Osaka Univ. Osaka
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GAMO Kenji
Department of Electrical Engineering,Faculty of Engineering Sciences,Osaka University
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Gamo Kenji
Department Of Electrical Engineering Faculty Of Engineering Science Osaka University
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Nonoyama Shinji
Quantum Material Research Laboratory Frontier Research Program The Institute Of Physical And Chemica
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Namba Susumu
Research Center For Extreme Materials And Department Of Electrical Engineering Osaka University
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AIHARA Ryuzo
Eiko Engineering Co.Ltd.
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KOSUGI Toshihiko
Department of Electrical Engineering, Faculty of Engineering Science, Osaka University
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MIMURA Ryou
JEOL Ltd
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AIHARA Ryuzo
JEOL Ltd
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Kosugi Toshihiko
Department Of Electric Engineering Faculty Of Engineering Science Osaka University
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KOSUGI Toshihiko
NTT Wireless System Laboratories
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Mimura R
Jeol Ltd
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Namba Susumu
Department Of Electrical Engineering Faculty Of Engineering Science Osaka University
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Namba S
Riken The Institute Of Physical And Chemical Research
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Namba S
Faculty Of Engineering Osaka University
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NAMBA Susumu
Research Center for Extreme Materials and Department of Electrical Engineering, Osaka University
関連論文
- Internal Q-Switching in n-Type GaAs Lasers under Electron Beam Excitation
- Abnormal Laser Emission from Electron Beam Excited GaAs
- Laser Surface Cleaning in Air: Mechanisms and Applications
- Fabrication of Slot-Antenna Coupled Warm Carrier Detectors for Submillimeter Wave Radiation
- Thin-Film Slot Antennas for 2.5 THz Submillimeter Radiation
- Fabrication of Antenna-Coupled Microbolometers
- Effects of Heat Treatment on the Sensitivity of Warm Carrier Devices for CH_3OH Laser Radiation
- Thin-Film Long-Wire Antenna for 10.6 μm CO_2 Laser Radiation
- Investigation of Hall Resistivity in Antidot Lattices with respect to Commensurability Oscillations
- Current-Direction-Dependent Commensurate Oscillations in GaAs/AlGaAs Antidot Superlattice
- Low-Energy Ion-Beam Irradiation Effects on Two-Dimensional Electron Gas in Modulation-Doped AlGaAs/ GaAs Heterostructure : Micro/nanofabrication and Devices
- Low-Energy Ion-Beam Irradiation Effects on Two-Dimensional Electron Gas in Modulation-Doped AlGaAs/GaAs Heterostructure
- Anderson Localization and Universal Conductance Fluctuations with Spin-Orbit Interactions in δ-Doped GaAs Films and Wires
- Phase Coherence Length in Planar Doped Thin GaAs Wires Fabricated by Ion Beam Etching : Microfabrication and Physics
- Phase Coherence Length in Planar Doped Thin GaAs Wires Fabricated by Ion Beam Etching
- Three-Dimensional Analysis of Locally Implanted Atoms by MeV Helium Ion Microprobe
- Fabrication of Periodic Structures in GaAs by Focused-Ion-Beam Implantation : Microfabrication and Physics
- Fabrication of Periodic Structures in GaAs by Focused-Ion-Beam Implantation
- 40 nm Width Structure of GaAs Fabricated by Fine Focused Ion Beam Lithography and Chlorine Reactive Ion Etching : Techniques, Instrumentations and Measurement
- FIB Exposure Characteristics of LB Film
- Ridge Type Microfabrication by Maskless Ion Implantation of Si into SiO_2 Film
- Metastable Domain Structures of Ferromagnetic Microstructures Observed by Soft X-Ray Magnetic Circular Dichroism Microscopy
- Enhanced Diffusion and Lattice Location of Indium and Gallium Implanted in Silicon
- Novel Electron-Beam Molecular Resists with High Resolution and High Sensitivity for Nanometer Lithography
- Fabrication of Planar-Type Ferromagnet/Nonmagnet/Ferromagnet Structures Using Multiangle Deposition
- Study of Magnetostatic Interaction in Magnetic Multilayer Wires Using Exchange Anisotropy
- Effects of Stray Fields in Flat-End and Pointed-End NiFe/Cu/NiFe/NiO Wires : Magnetism
- Galvanomagnetic Effect and Magnetization Process in CoO/Co/NiFe Film with Antidot Array
- Effects of Shape Anisotropy in CoO/Co/Cu/NiFe/Cu/Co Wires
- Magnetization Processes in Narrow and Wide Cross-shaped Co/Cu/NiFe Wires
- Galvanomagnetic Effect of Submicron Exchange-Coupled Co/Ni Wire
- Microfabricated Submicron Al-Filament Biprism as Applied to Electron Holography : Micro/nanofabrication and Devices
- Microfabricated Submicron Al-Filament Biprism as Applied to Electron Holography
- The Characteristics of Ion-Beam-Induced Spontaneous Etching of GaAs by Low-Energy Focused Ion Beam Irradiation : Focused Ion Beam Process
- The Characteristics of Ion-Beam-Induced Spontaneous Etching of GaAs by Low-Energy Focused Ion Beam Irradiation
- Low Energy Focused Ion Beam System and Application to Low Damage Microprocess : Etching and Deposition Technology
- Low Energy Focused Ion Beam System and Application to Low Damage Microprocess
- Ion Beam Assisted Deposition of Tungsten on GaAs
- Potential Modulation of Semiconductor Dot Array System due to Photoexcitation
- Electron-Beam-Induced Oxidation for Single-Electron Devices
- Investigation of Photoresponse in Photoconducting Semiconductor-Superconductor Microstructure
- Transport Properties and Fabrication of Coupled Electron Waveguides
- Magnetic Electron Focusing Effect in GaAs/AlGaAs Heterostructure with Gate-Controlled Byway Channel
- Magnetotransport in Hexagonal and Rectangular Antidot Lattices
- Investigation of In Situ Process for GaAs/AlGaAs Buried Quantum Wires
- Fabrication and Magnetotransport of One-Dimensional Lateral Surface Superlattice Fabricated by Low-Energy Ion Irradiation
- Magnetotransport in One-Dimensional Lateral Surface Superlattice Fabricated by Low-Energy Argon Ion Irradiation
- Estimation of Damage Induced by Focused Ga Ion Beam Irradiation
- Transport Properties of Coupled Electron Waveguides Buried irn Heterostructure
- Single Particle Relaxation Times from Shubnikov-de Haas Oscillations in Antidot Structures
- Maskless Etching of AN Using Focused Ion Beam
- Maskless Ion Beam Assisted Etching of Si Using Chlorine Gas
- New High Current Low Energy Ion Source
- Fabrication of Superconducting Weak Links by Electron Beam Lithography and Ion Implantation
- Dry Etching of Nb and Fabrication of Nb Variable-Thickness-Bridges
- Nonlinear Vibration of Liquid Droplet by Surface Acoustic Wave Excitation
- Distribution Profiles and Annealing Characteristics of Defects in GaAs Induced by Low-Energy FIB Irradiation : Electrical Properties of Condensed Matter
- Self-Development Mechanism of Nitrocellulose Resist : Electron Beam Irradiation
- Residual Local Strain in Gallium Arsenide Induced by Laser Pyrolytic Etchingin CCl_4 Atmosphere
- Local Temperature Rise during Laser Induced Etching of Gallium Arsenide in SiCl_4 Atmosphere
- Shubnikov-de Haas Oscillations in a Narrow GaAs/AlGaAs Wire
- Aperiodic Conductance Fluctuations in a Narrow GaAs/AlGaAs Wire
- Magnetization Process in Narrow and Wide Cross-Shaped Wires of Co/Cu/NiFe Structures
- Electrical and Magnetic Properties of Phthalocyanine Iodine Charge Transfer Complex
- Electrical Conduction in Phthalocyanine Single Crystals
- Photoconductivity of Copper Phthalocyanine Single Crystals
- A Loss Mechanism in Optical Waveguides Fabricated by Ion Implantation in Fused Quartz
- Lattice-Site Locations of Tin and Antimony Implanted in Gallium Phosphide
- Depth Distribution of Defects in Mg-Ion and Cd-Ion Implanted GaAs
- Photoluminescence Study of Cd-Ion Implanted n-GaAs
- Photoluminescence and Electrical Measurements on Manganese Ion-Implanted GaAs
- Lattice Site Location of Cadmium and Tellurium Implanted in Gallium Arsenide
- Activation Energies of Formation and Diffusion of As Vacancy in GaAs Measured by Photoluminescence
- Hall Effect Measurements of Zn Implanted GaAs
- Effects of Implantation Temperature on Lattice Location of Tellurium Implanted in Gallium Arsenide
- ESR Studies on Defects and Amorphous Phase in Silicon Produced by Ion Implantation
- Dose Dependence of Photoluminescence Degradation in Te Ion-Implanted GaAs
- Lattice Location of Sb Implanted in GaAs Single Crystals
- Concentration Profiles of Room Temperature Ion Implanted Indium in Silicon
- Low Temperature Magnetoresistance of a Quasi-Ballistic Narrow Wire Confined by Split Metal Gates
- Size Dependence of Universal Conductance Fluctuations in Narrow N^+ -GaAs Wires : II. LOW TEMPERATURE PROPERTIES OF SOLIDS : Localization, Mesoscopic Systems
- A Transverse Electron Beam Source for the Excitation of CW Lasers
- Focused Ion Beam Process for Formation of a Metal/Insulator/Metal Double Tunnel Junction
- Exchange Interaction from Current and Voltage Probes in Galvanomagnetic Effect in Polycrystal Co Thin Film
- Characterization of Directly Deposited Silicon Films Using Low-Energy Focused Ion Beam
- Maskless Deposition of Au on GaAs by Low-Energy Focused Ion Beam
- Ballistic Electron Transmission in GaAs-AlGaAs Crossed Wire Junctions
- Transport Properties of a Resistively-Coupled Single-Electron Transistor
- Transport Properties of Resistively-Coupled Single-Electron Transistor
- Quantum Transport in PtSi Thin Films and Narrow Wires
- Transport Properties in Hexagonal Arrays of Antidots with Different Carrier Densities
- Numerical Study of the Charge Distribution in a Quantum Wire Consisting a Junction of Wide-Narrow Geometry
- Ab Initio Cluster Study of the Interaction of Hydrogen with the GaAs(100) Surface
- Ballistic Electron Transport on Periodic and Quasi-Periodic Triangular Lattices of Scatterers : Micro/nanofabrication and Devices
- Ballistic Electron Transport on Periodic and Quasi-Periodic Triangular Lattices of Scatterers
- Electron Focusing in a Widely Tapered Cross Junction
- Maskless Ion Implantation of Cerium by Focused Ion Beam : Techniques, Instrumentations and Measurement
- Fabrication of Ballistic Quantum Wires and Their Transport Properties : Microfabrication and Physics
- Stoichiometric Change in Gallium Arsenide after Laser-Induced Thermochemical Etching
- Microanalysis by Focused MeV Helium Ion Beam