Microanalysis by Focused MeV Helium Ion Beam
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概要
- 論文の詳細を見る
A microbeam line with 1.5 MeV helium ions for Rutherford backscattering (RBS) and particle-induced X-ray emission (PIXE) measurements has been realized by piezo-driven objective slits and a magnetic quadrupole doublet. A minimum beam spot size of 1.3 μm×2.2 μm was obtained. Secondary electron and Rutherford backscattering mapping images were demonstrated.
- 社団法人応用物理学会の論文
- 1987-05-20
著者
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Namba S
Japan Atomic Energy Res. Inst. Kyoto Jpn
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Izumi Masahiro
Faculty Of Engineering Science Osaka University
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Gamo Kenji
Faculty Of Engineering Science And Research Center For Extreme Materials Osaka University
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Takai Mikio
Faculty Of Engineering Science And Research Center For Extreme Materials (rcem) Osaka University
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Namba S
Riken The Institute Of Physical And Chemical Research
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Namba Susumu
Faculty Of Engineering Science And Research Center For Extreme Materials (rcem) Osaka University
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MATSUNAGA Kouji
Faculty of Engineering Science, Osaka University
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INOUE Kenichi
Faculty of Engineering Science, Osaka University
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SATO Mamoru
Government Industrial Research Institute Osaka
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Matsunaga K
Japan Fine Ceramics Center Nagoya Jpn
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Namba S
Faculty Of Engineering Osaka University
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Inoue Kenichi
Faculty Of Engineering Science Osaka University:asada Research Laboratory Kobe Steel Ltd.
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