Changes of Volume and Surface Compositions of Polymethylmethacrylate under Electron Beam Irradiation in Lithography
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概要
- 論文の詳細を見る
The change of the content of oxygen and carbon in Polymethylmethacrylate (PMMA) under electron beam irradiation is investigated by Auger electron spectroscopy (AES) whereby we estimate the characteristic energy deposition of the decrement of oxygen to be 0.8-l.2×10^3eV/nm^3. It is also confirmed that cooling of PMMA considerably reduces the elimination rate of oxygen and that the decrement of the thickness of PMMA film under electron beam irradiation is closely related to the change of oxygen content. Moreover, it is shown that the PMMA alters from the positive resist to the negative resist as determined by observing thickness changes.
- 社団法人応用物理学会の論文
- 1985-04-20
著者
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SHIMIZU Ryuichi
Faculty of Engineering, Osaka University
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Shimizu R
Osaka Univ. Osaka Jpn
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Hashimoto Hatsujiro
Faculty Of Engineering Okayama University Of Science
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SAMOTO Norihiko
Photonic and Wireless Devices Research Labs., NEC Corporation
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SAMOTO Norihiko
Faculty of Engineering, Osaka University
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Samoto N
Kansai Electronics Research Laboratories Nec Corporation
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Shimizu Ryuichi
Faculty Of Engineering Osaka University
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