Basic Study of Quantitative Ion Scattering Spectroscopy I Correction Factors for Quantification
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概要
- 論文の詳細を見る
Basic problems in quantification by ion scattering spectroscopy (ISS), i.e., energy dependence of the detection efficiency of a micro channel plate (MCP) and neutralization probabilities, have been studied using a newly constructed time of flight (TOF)-ISS apparatus. For primary ion energy below keV (1) marked dependence of the detection efficiency of MCP on the signal energy, and (2) strong contribution, to the ISS spectrum, of those neutral signals that are backscattered through the collision with the second or subsequent atomic layer atoms have been clearly revealed. It has also been pointed out that the energy dependence of the detection efficiency is described very well by a simple statistical treatment of secondary electron generation in the detector.
- 社団法人応用物理学会の論文
- 1997-12-15
著者
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Kang Hee
Department Of Dermatology Ajou University School Of Medicine
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SHIMIZU Ryuichi
Department of Applied Physics, Osaka University
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Kondo A
Osaka Prefecture Univ. Osaka Jpn
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Kondo Akio
Department Of Applied Physics Faculty Of Engineering Osaka University
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Kang Hee
Department Of Applied Physics Osaka University:department Of Physics Sciences Chungbuk National Univ
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Kang Hee
Department Of Physics Chungbuk National University
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Souda R
National Institute For Research In Inorganic Materials
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Shimizu R
Department Of Information Science Osaka Institute Of Technology
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Shimizu R
Osaka Univ. Osaka Jpn
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Shimizu Ryuichi
Department Of Applied Physics Faculty Of Engineering Osaka University
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ASAHATA Tatsuya
Department of Applied Physics, Faculty of Engineering, Osaka University
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ONOBU Masanori
Department of Applied Physics, Osaka University
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Onobu Masanori
Department Of Applied Physics Osaka University
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Asahata Tatsuya
Department Of Applied Physics Faculty Of Engineering Osaka University
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Shimizu Ryuichi
Department Of Applied Physics Faculty Engineering Osaka University
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Shimizu Ryuichi
Department of Information Processing, Osaka Institute of Technology
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