Sputtering of Si with keV Ar^+ Ions. : I. Measurement and Monte Carlo Calculations of Sputtering Yield
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1979-09-05
著者
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Kang Suk
Department of Materials Science and Engineering, Seoul National University
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Kang Suk
Department Of Applied Physics Faculty Of Engineering Osaka University
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SHIMIZU Ryuichi
Department of Applied Physics, Osaka University
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Shimizu Ryuichi
Department Of Applied Physics Faculty Of Engineering Osaka University
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OKUTANI Tsuyoshi
Department of Applied Physics, Faculty of Engineering, Osaka University
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Okutani Tsuyoshi
Department Of Applied Physics Faculty Of Engineering Osaka University
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Shimizu Ryuichi
Department Of Applied Physics Faculty Engineering Osaka University
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SHIMIZU Ryuichi
Department of Applied Physics, Faculty of Engineering, Osaka University
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