A New Bessel-Box Energy Analyzer for Sputtered Neutral Mass Spectrometry
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1990-02-20
著者
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Yoshikawa Hiroaki
Department Of Electrical Engineering Osaka University
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YOSHIKAWA Hideki
Department of Orthopaedic Surgery, Osaka University Graduate School of Medicine
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SHIMIZU Ryuichi
Department of Applied Physics, Osaka University
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Yoshikawa H
Gunma Univ. Gunma Jpn
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Shimizu Ryuichi
Department Of Applied Physics Faculty Of Engineering Osaka University
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Yoshikawa Hideki
Department Of Applied Physics Osaka University
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Shimizu Ryuichi
Department Of Applied Physics Faculty Engineering Osaka University
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