Monte Carlo Simulation for Auger Depth Profiling of GaAs/AlAs Superlattice Structure by Ar^+ Ion Sputtering

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1996-04-15

著者

• Inoue M

  Department Of Electrical Engineering Osaka Prefectural Technical College

• Inoue M

  Osaka Inst. Technol. Osaka Jpn

• Inoue M

  Setsunan Univ. Osaka Jpn

• Lee H‐i

  Department Of Applied Physics Faculty Of Engineering Osaka University

• Hofmann S

  National Res. Inst. Metals Ibaraki Jpn

• Inoue Masami

  Association Of Super-advanced Electronics Technologies (aset)

• Inoue Masahiko

  Department Of Neurology Showa University Fujigaoka Hospital

• Inoue M

  Assoc. Super‐advanced Electronics Technol. (aset) Yokohama Jpn

• Inoue M

  Nanomaterials Microdevices Research Center Osaka Institute Of Technology

• Inoue M

  Kyoto Univ. Kyoto Jpn

• Inoue Masumi

  Department Of Quantum Engineering Nagoya University

• SHIMIZU Ryuichi

  Department of Applied Physics, Osaka University

• LEE Hyung-Ik

  Department of Applied Physics, Faculty of Engineering, Osaka University

• KAJIWARA Kazuo

  Sony Corporation

• HOFMANN Siegfried

  Department of Applied Physics, Faculty of Engineering, Osaka University

• Inoue Masataka

  Nanomaterials Microdevices Research Center Osaka Institute Of Technology

• Inoue M

  Advanced Technology R&d Center Mitsubishi Electric Corp.

• Hofmann Siegfried

  Department Of Applied Physics Faculty Of Engineering Osaka University:(present Address) Max-planck-i

• Lee Hyung-ik

  Department Of Applied Physics Faculty Of Engineering Osaka University

• Souda R

  National Institute For Research In Inorganic Materials

• Shimizu R

  Department Of Information Science Osaka Institute Of Technology

• Shimizu R

  Osaka Univ. Osaka Jpn

• Shimizu Ryuichi

  Department Of Applied Physics Faculty Of Engineering Osaka University

• Inoue Masahiko

  Department Of Applied Physics Faculty Of Engineering Osaka University

• Shimizu Ryuichi

  Department Of Applied Physics Faculty Engineering Osaka University

• Shimizu Ryuichi

  Department of Information Processing, Osaka Institute of Technology

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