Angular Distributions of Sputtered Particles Ejected from Pure Cu, Pt and Cu -Pt Alloy under 3 keV Ar^+ Ton Bombardment
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概要
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The 'over-cosine' distribution peculiar to the angular distribution of Pt atoms sputtered from pure Pt and Cu-Pt(19 at %) alloy targets has been studied experimentally and theoretically. The angular distributions were measured for pure Cu, Pt and Cu-Pt alloy under 3 keV Ar^+ ion bombardment at different incident angles in ultrahighvacuum. Significant 'over-cosine' distributions of sputtered Pt atoms have been observed for both the pure Pt and Cu-Pt alloy, as reported by Anderscen el at. As a theoretical approach, Monte Carlo simulation has been performed by taking into account the altered layer formed on the alloy surface, which was obtained experimentally in theprevious study. The comparison between the experiment and the simulation has revealed that the peculiarity of the angular distribution of sputtered Pt atoms still cannot be understood by the present simulation, whilst the simulation describes the angular distributions of other metals with considerable success.
- 社団法人応用物理学会の論文
- 1994-12-15
著者
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Min Kyung-youl
Department Of Applied Physics Osaka University
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Shimizu Ryuichi
Department Of Applied Physics Faculty Of Engineering Osaka University
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Nagatomi Takaharu
Department Of Applied Physics Osaka University
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Shimizu Ryuichi
Department Of Applied Physics Faculty Engineering Osaka University
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