Secondary Electron Emission from Aluminum by Argon and Oxygen Ion Bombardment below 3 keV
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概要
- 論文の詳細を見る
The potential emission from aluminum under argon ion bombardment and an enhanced emission under oxygen ion bombardment have been investigated for an aluminum sample. For this a compact energy analyzer was made to measure energy distribution of secondary electrons at certain detection angle as well as total yield for the energy range from 0.7 to 3.0 keV. The results show that the electron yield owing to potential emission is between about 0.07 and 0.08 for argon ions and the enhancement in kinetic emission by oxygen ion bombardment results in marked increase in the yield of more than one order of magnitude higher than that for argon ions.
- 社団法人応用物理学会の論文
- 1983-04-20
著者
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Shimizu Ryuichi
Department Of Applied Physics Faculty Of Engineering Osaka University
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Yamauchi Yasushi
Department Of Applied Physics Osaka University
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Shimizu Ryuichi
Department Of Applied Physics Faculty Engineering Osaka University
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