Monte Carlo Simulation Approach to Sputtering in Multi-Component Targets
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1985-11-20
著者
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Kang Hee
Department Of Dermatology Ajou University School Of Medicine
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SHIMIZU Ryuichi
Department of Applied Physics, Osaka University
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Kang Hee
Department Of Applied Physics Osaka University:department Of Physics Sciences Chungbuk National Univ
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KAWATOH Eizou
Department of Engineering, Osaka University
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Kang H
Samsung Electronics Suwon Kor
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Kawatoh E
Osaka Univ. Osaka
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KAWATOH Eizoh
Department of Applied Physics, Osaka University
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Kawatoh Eizoh
Department Of Applied Physics Faculty Of Engineering Osaka University
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Shimizu R
Osaka Univ. Osaka Jpn
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Shimizu Ryuichi
Department Of Applied Physics Faculty Of Engineering Osaka University
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Shimizu Ryuichi
Department Of Applied Physics Faculty Engineering Osaka University
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