New Computer Simulation Software of Electron Trajectories for Evaluation of Magnetic Field Immersion-Type Field Emission Gun
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概要
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A new software program was developed for tracing electron trajectories in electrostatic and magnetic fields with a high precision. This source program based on a boundary element method (BEM) has been applied to evaluate the brightness of a magnetic field immersion-type field emission gun. The charge distribution on the electrode surface obtained by the BEM was used in a three-dimensional electromagnetic field analysis to calculate electron trajectories in a field emission with a sufficiently high precision. The brightness of this electron gun was evaluated as a function of emission half-angle by ray tracing electron trajectories in electrostatic and magnetic fields. The obtained results indicate that the brightness of the magnetic field immersion-type field emission gun is very high compared with that of a conventional field emission gun equipped with a Butler-type electrostatic lens even slightly better than that of a field emission gun equipped with a preaccelerating magnetic lens which has been used in a 1 MV electron microscope.
- 2007-02-15
著者
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Ikuta Takashi
Department Of Applied Physics Faculty Engineering Osaka University
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ICHIHASHI Mikio
Division of Nano-materials Science, EcoTopia Science Institute, Nagoya University
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Tamura Keiji
Department Of Electronic Engineering Osaka Institute Of Technology
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Shimizu Ryuichi
Department Of Applied Physics Faculty Engineering Osaka University
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Tamura Keiji
Department of Information Science, Osaka Institute of Technology, Hirakata, Osaka 573-0196, Japan
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Ichihashi Mikio
Division of Nano-materials Science, EcoTopia Science Institute, Nagoya University, Nagoya 464-8603, Japan
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Shimizu Ryuichi
Department of Information Science, Osaka Institute of Technology, Hirakata, Osaka 573-0196, Japan
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