Secondary Electron Measurement with Auger Electron Microprobe. : I. Calibration of the CMA in the Low-Energy Region
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概要
- 論文の詳細を見る
The characteristics of the cylindrical mirror analyzer (CMA) attached to a commercial-type scanning Auger electron microprobe, JAMP-3, were examined for its possible use in monitoring the variation of surface properties through themeasurement of the energy distribution of secondary electrons, the N_s(E)-spectrum. For this purpose, a special compactelectron gun, small enough to be attached inside a sample holder, was made to calibrate the energy scale of the CMA, and a special arrangement for sample setting was devised to measure the N_s(E)-spectra. This arrangement enables thevariation of surface potential to be detected throught the shift of the cut-off point of the N_s(E)-spectrum with as good accuracy as can be obtained by an ESCA-system.
- 社団法人応用物理学会の論文
- 1985-09-20
著者
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Shimizu Ryuichi
Department Of Applied Physics Faculty Of Engineering Osaka University
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Shimizu Ryuichi
Department Of Applied Physics Osaka University
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Hashimoto Hatsujiro
Department Of Applied Physics Faculty Of Engineering Osaka University
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Hashimoto Hatsujiro
Department Of Applied Physics Osaka University
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Coon Ikuo
Department of Applied Physics, osaka University
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Coon Ikuo
Department Of Applied Physics Osaka University
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Shimizu Ryuichi
Department Of Applied Physics Faculty Engineering Osaka University
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HASHIMOTO Hatsujiro
Department of Applied Physics, Osaka University
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