High-Performance X-Ray Mask Fabrication Using TaGeN Absorber and Dummy Pattern Method for Sub-100nm Proximity X-Ray Lithography : Instrumentation, Measurement, and Fabrication Technology
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2001-04-15
著者
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Hokama A
Control And Prevention Of Infectious Diseases Department Of Medicine And Therapeutics Faculty Of Med
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Hokama Akira
琉球大学 医学部感染病態制御学
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中山 喜萬
阪大工
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TAGUCHI Takao
SORTEC Corporation
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NAKAYAMA Yoshinori
ASET Super-fine SR Lithography Laboratory, co NTT Telecommnications Energy Laboratories
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AOYAMA Hajime
ASET Super-fine SR Lithography Laboratory, co NTT Telecommnications Energy Laboratories
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MATSUI Yasuji
ASET Super-fine SR Lithography Laboratory, co NTT Telecommnications Energy Laboratories
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Aoyama H
Aset Super-fine Sr Lithography Laboratory
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Aoyama Hajime
Super-fine Sr Lithography Laboratory Association Of Super-advanced Electronics Technologies(aset) At
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Aoyama Hajime
Super-fine Sr Lithography Lab. Association Of Super-advanced Electronics Technologies (aset) Co Ntt
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Iizuka Takashi
Fujitsu Laboratories Ltd.:aset Super-fine Sr Lithography Laboratory
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Taguchi T
Research Laboratories Nippondenso Co. Ltd.
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Hokama Akira
The First Department Of Internal Medicine Faculty Of Medicine University Of The Ryukyus
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Matsui Yasushi
Electronics Research Laboratory Corporate Research & Development Matsushita Electronics Corporat
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Matsui Y
Assoc. Super‐advanced Electronics Technol. (aset) Kanagawa Jpn
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Matsui Y
Nims Tsukuba Jpn
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HORIUCHI Kei
Fujitsu Laboratories Ltd.
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IBA Yoshihisa
Fujitsu Laboratories Ltd.
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TAGUCHI Takao
ASET Super-fine SR Lithography Laboratory
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KUMASAKA Fumiaki
Fujitsu Laboratories Ltd.
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Nakayama Yoshinori
Aset Super-fine Sr Lithography Laboratory
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MATSUI Yoshio
Environmental Pollution Research Institute of Nagoya City
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Matsui Y
Central Research Laboratory Hitachi Ltd.
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Muto Y
The Institute For Materials Research Tohoku University
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Horiuchi K
Fujitsu Laboratories Ltd.
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Horiuchi Kei
Fujitsu Laboratories
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Iba Yoshihisa
Fujitsu Laboratories Ltd.:aset Super-fine Sr Lithography Laboratory
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Taguchi T
Department Of Electrical And Electronic Engineering Yamaguchi University
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Iizuka T
Fujitsu Laboratories Ltd.:aset Super-fine Sr Lithography Laboratory
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AOYAMA Hidetake
Department of Electrical Engineering, Faculty of Engineering, Gunma University
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Matsui Yasuji
Aset Super-fine Sr Lithography Laboratory
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MATUSI Yasuji
Product Development Laboratory, Mitsubishi Electric Corporation
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Kumasaka Fumiaki
Fujitsu Laboratories Ltd.:aset Super-fine Sr Lithography Laboratory
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Iizuka Takashi
Fujitsu Laboratories Ltd.
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Aoyama Hajime
ASET Super-fine SR Lithography Laboratory, Atsugi, Kanagawa 243-0198, Japan
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