Direct Nanolithography of Organic Polysilane Films Using Carbon Nanotube Tips

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 2000-12-30

著者

• 中山 喜萬

  阪大工

• 秋田 成司

  阪府大工

• Ishida Tadashi

  National Institute Of Advanced Industrial Science And Technology

• Okazaki Ai

  Department Of Physics And Electronics Osaka Prefecture University

• Okazaki A

  Osaka Prefecture Univ. Osaka Jpn

• Okazaki Atsushi

  Department Of Physics Kyushu University

• Ishida Toshimasa

  Research Laboratory Oki Electric Industry Co. Lid

• AKITA Seiji

  Department of Physics and Electronics, Graduate School of Engineering, Osaka Prefecture University

• NAKAYAMA Yoshikazu

  Department of Physics and Electronics, Graduate School of Engineering, Osaka Prefecture University

• Ishida Takayuki

  Department Of Radiology National Federation Of Health Insurance Societies Osaka Chuo Hospital

• KISHIDA Takayoshi

  Department of Physics and Electronics, Osaka Prefecture University

• NISHIJIMA Hidehiro

  Department of Physics and Electronics, Osaka Prefecture University

• Nakayama Yoshinori

  Aset Super-fine Sr Lithography Laboratory

• Nakayama Yoshikazu

  Department Of Electrical Engineering College Of Engineering University Of Osaka

• Akita Seiji

  Department Of Physics And Electronics College Of Engineering University Of Osaka Prefecture

• Nishijima Hidehiro

  Department Of Physics And Electronics Osaka Prefecture University

• Akita Shirabe

  Central Research Institute Of Electric Power Industry

• Kishida Takayoshi

  Department Of Physics And Electronics Osaka Prefecture University

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