Precise Angle and Position Detection Utilizing Optical Interference on Metal-Oxide-Semiconductor-Type Position-Sensitive Detectors
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概要
- 論文の詳細を見る
The optical interference effect is applied to the previously presented metal-oxide-semiconductor (MOS)-type position-sensitive detector (PSD) to achieve more precise measurements. New interference methods are proposed for the precise measurement of angles and positions, which have been examined by the use of Al-SiO_2-Si PSD. It has been experimentally verified that the PSD is convenient for optical interference to produce periodic output signals indicating half-wavelength displacement. A resolution of one second has been demonstrated for the simple angle-detection system in which only an optical-parallel glass plate is added to the PSD measurement system, and that of 20 nm for the position-detection system of a Michelson-type interferometer incorporated with the PSD.
- 社団法人応用物理学会の論文
- 1995-02-15
著者
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NIU Hirohiko
Department of Electrical Engineering and Computer Sciences, Graduate School of Engineering, Universi
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YOSHIDA Hidetsugu
Institute of Laser Engineering, Osaka University
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MATSUDA Tadahito
NTT System Electronics Laboratories
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YOSHIDA HARUHIKO
Department of Gastroenterology, Faculty of Medicine, University of Tokyo
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Yoshida Hidemi
Thin Films Laboratory Research Center Mitsubishi Kasei Corporation
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MATSUDA TETSURO
Department of Surgery, Soseikai General Hospital
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Matsuda T
Ntt Telecommunications Energy Laboratories
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Matsuda Tetsuro
Department Of Electronics Himeji Institute Of Technology
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Matsuda T
Tokyo Inst. Technol. Tokyo Jpn
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Kishino S
Department Of Electronics Faculty Of Engineering Himeji Institute Of Technology
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Shiraishi Takehisa
Department of Electronics, Faculty of Engineering, Himeji Institute of Technology
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Kishino Seigo
Department of Electronics, Faculty of Engineering, Himeji Institute of Technology
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Niu Hirohiko
Department Of Electrical Electronic And Computer Engineering Graduate School Of Engineering Himeji I
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Yoshida Haruhiko
Department Of Gastroenterology Faculty Of Medicine University Of Tokyo
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Shiraishi Takehisa
Department Of Electronics Faculty Of Engineering Himeji Institute Of Technology
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Niu Hirohiko
Department of Electronics, Faculty of Engineering, Himeji Institute of Technology
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Yoshida Haruhiko
Department of Electronics, Himeji Institute of Technology, Shosha, Himeji 671-22
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