MOS-Type One-Dimensional Position-Sensitive Detectors with a Linearly Delectable Face of 30 mm Long
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概要
- 論文の詳細を見る
Experiments have been conducted for the MOS-type position-sensitive detector (PSD) to make one-dimensional PSDs of large detection range, based on the previous theoretical suggestion that the MOS-type PSD under some conditions linearly detects a light-spot position in the full range of its detectable face. The almost perfect linearity and also fine resolution higher than 1 μm have been demonstrated for an Al-SiO_2-Si one-dimensional PSD with a detectable face of 30 mm long.
- 社団法人応用物理学会の論文
- 1991-04-15
著者
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YOSHIDA Hidetsugu
Institute of Laser Engineering, Osaka University
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MATSUDA Tadahito
NTT System Electronics Laboratories
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Yoshida Hidemi
Thin Films Laboratory Research Center Mitsubishi Kasei Corporation
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MATSUBARA Yoshihisa
ULSI Device Development Laboratories, NE C Corporation
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Matsuda T
Ntt Telecommunications Energy Laboratories
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Matsuda Tetsuro
Department Of Electronics Himeji Institute Of Technology
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Matsuda T
Tokyo Inst. Technol. Tokyo Jpn
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Kishino S
Department Of Electronics Faculty Of Engineering Himeji Institute Of Technology
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Kishino Seigo
Department of Electronics, Faculty of Engineering, Himeji Institute of Technology
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Niu Hirohiko
Department Of Electrical Electronic And Computer Engineering Graduate School Of Engineering Himeji I
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Yoshida Haruhiko
Department Of Gastroenterology Faculty Of Medicine University Of Tokyo
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MATSUBARA Yoshihiro
Department of Electronics, Faculty of Engineering, Himeji Institute of Technology
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KODAI Toshiya
Department of Electronics, Faculty of Engineering, Himeji Institute of Technology
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Kodai Toshiya
Department Of Electronics Faculty Of Engineering Himeji Institute Of Technology
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Matsubara Y
Ulsi Device Development Laboratories Ne C Corporation
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Niu Hirohiko
Department of Electronics, Faculty of Engineering, Himeji Institute of Technology
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MATSUBARA Yoshihiro
Department of Data Management and Analyses, Translational Research Information Center
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Yoshida Haruhiko
Department of Electronics, Himeji Institute of Technology, Shosha, Himeji 671-22
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