Piezo- and Ferroelectric Properties of Self-Assembled PbTiO3 Nanoisland Structures Fabricated by Metalorganic Chemical Vapor Deposition
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概要
- 論文の詳細を見る
Self-assembled PbTiO3 nanoisland structures were fabricated on Pt/SiO2/Si at 400°C by metalorganic chemical vapor deposition. The average width and height were 35 and 1.9 nm for PbTiO3 grown for 10 s, and 35 and 3.6 nm for that grown for 20 s, respectively. In-plane X-ray diffraction showed that PbTiO3 nanoisland structures had a tetragonal structure and only c-domains. Piezoresponse force microscopy revealed that the piezoresponse signal decreased with a decrease in the height of nanoisland structures. The minimum height and width of PbTiO3 nanoisland structures showing a piezoelectric hysteresis loop were 1.2 and 27 nm, respectively.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-09-15
著者
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Honda Koichiro
Fujitsu Lab. Ltd. Kanagawa Jpn
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Fujisawa Hironori
Department Of Electrical Electronic And Computer Engineering Graduate School Of Engineering Hitneji
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Niu Hirohiko
Department Of Electrical Electronic And Computer Engineering Graduate School Of Engineering Himeji I
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Okaniwa Mamoru
Department Of Electrical Electronic And Computer Engineering Graduate School Of Engineering Himeji I
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Shimizu Masaru
Department Of Chemical Engineering Faculty Of Engineering Tokyo University Of Agriculture And Techno
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Niu Hirohiko
Department of Electrical Engineering and Computer Sciences, Himeji Institute of Technology, 2167 Shosha, Himeji, Hyogo 671-2201, Japan
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Okaniwa Mamoru
Department of Electrical Engineering and Computer Sciences, Himeji Institute of Technology, 2167 Shosha, Himeji, Hyogo 671-2201, Japan
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Shimizu Masaru
Department of Electrical Engineering and Computer Sciences, Himeji Institute of Technology, 2167 Shosha, Himeji, Hyogo 671-2201, Japan
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Fujisawa Hironori
Department of Electrical Engineering and Computer Sciences, Himeji Institute of Technology, 2167 Shosha, Himeji, Hyogo 671-2201, Japan
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