Self-Assembled PbTiO3 Nano-Islands Prepared on SrTiO3 by Metalorganic Chemical Vapor Deposition
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概要
- 論文の詳細を見る
PbTiO3 nano-islands were prepared on Pt(111)/SiO2/Si(100), Pt(111)/SrTiO3(111) and Pt(110)/SrTiO3(110) substrates by metalorganic chemical vapor deposition (MOCVD). When PbTiO3 was deposited on Pt(111)/SiO2/Si, PbTiO3 nano-islands on different Pt grains had different in-plane orientations. On the other hand, all PbTiO3 nano-islands on Pt(111)/SrTiO3(111) showed the same in-plane orientation. The size of PbTiO3 nano-islands on the Pt(111)/SrTiO3(111) substrate was uniform compared with that on the Pt(111)/SiO2/Si(100) substrate. When PbTiO3 islands were deposited on a Pt(110)/SrTiO3(110) substrate, triangular-prism-shaped PbTiO3 islands, which preferentially grew along the $\langle 010 \rangle$ direction, were obtained. These PbTiO3 nano-islands had also uniform in-plane orientation. These results showed that the size, shape and in-plane orientation of self-assembled ferroelectric nano-islands by MOCVD were fairly controllable using the epitaxial relation.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2003-09-15
著者
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Honda Koichiro
Fujitsu Lab. Ltd. Kanagawa Jpn
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Nonomura Hajime
Department Of Electrical Engineering And Computer Sciences Graduate School Of Engineering University
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Fujisawa Hironori
Department Of Electrical Electronic And Computer Engineering Graduate School Of Engineering Hitneji
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Niu Hirohiko
Department Of Electrical Electronic And Computer Engineering Graduate School Of Engineering Himeji I
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Shimizu Masaru
Department Of Chemical Engineering Faculty Of Engineering Tokyo University Of Agriculture And Techno
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Niu Hirohiko
Department of Electrical Engineering and Computer Sciences, Graduate School of Engineering, Himeji Institute of Technology, 2167 Shosha, Himeji, Hyogo 671-2201, Japan
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Nonomura Hajime
Department of Electrical Engineering and Computer Sciences, Graduate School of Engineering, Himeji Institute of Technology, 2167 Shosha, Himeji, Hyogo 671-2201, Japan
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Fujisawa Hironori
Department of Electrical Engineering and Computer Sciences, Graduate School of Engineering, Himeji Institute of Technology, 2167 Shosha, Himeji, Hyogo 671-2201, Japan
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