Piezoresponse Force Microscopy Observations of Switching Behavior in Pb(Zr,Ti)O3 Capacitors
スポンサーリンク
概要
- 論文の詳細を見る
We report on the polarization switching behavior in Pt/Pb(Zr,Ti)O3 (PZT)/SrRuO3/SrTiO3(111) capacitors observed by piezoresponse force microscopy (PFM). Through PFM observations of capacitors partially switched by applying switching pulses shorter than the switching time, the nucleation behavior and domain growth were investigated. Polarization switching preferentially originated from preexisting latent nuclei and consequently, switched domains appeared at the same positions for various pulses with the same polarity. On the other hand, switched domains were observed at different positions for voltage pulses with different polarities. On the basis of a comparison of domain patterns with topography, it is suggested that switched domains are roughly associated with PZT grains and that each grain has preferred polarization directions. Switching current measurements revealed that a voltage drop across the series resistance of the SrRuO3 bottom electrode and PFM system occurred in our measurements because the switching currents were more than 10 mA. Due to this voltage drop, the effective voltage applied to PZT thin film ($V_{\text{PZT,eff}}$) was almost constant at 2.8 V when external pulse voltages were changed from $\pm 4$ to $\pm 10$ V. For $V_{\text{PZT,eff}}$ of 2.8 V, the density of latent nuclei and the velocity of sideward domain growth were estimated to be ${\sim}1$ μm-2 and 15 m/s, respectively.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-09-15
著者
-
Fujisawa Hironori
Department Of Electrical Electronic And Computer Engineering Graduate School Of Engineering Hitneji
-
Niu Hirohiko
Department Of Electrical Electronic And Computer Engineering Graduate School Of Engineering Himeji I
-
Shimizu Masaru
Department Of Chemical Engineering Faculty Of Engineering Tokyo University Of Agriculture And Techno
-
Niu Hirohiko
Department of Electrical Engineering and Computer Sciences, Graduate School of Engineering, University of Hyogo, 2167 Shosha, Himeji, Hyogo 671-2201, Japan
関連論文
- Direct Crystallization and Characterization of Bi_3TiTaO_9 Thin Films Prepared by Metalorganic Chemical Vapor Deposition
- MOCVD法により形成したPbTiO_3自己集合島の構造制御(新型不揮発性メモリー)
- 強誘電体ナノワイヤ及びナノアイランドの自発分極に関する研究 (平成21年度研究報告)
- ナノ強誘電体の基礎物性 : 現状と将来展望
- PbTiO_3- and Pb(Zr,Ti)O_3-Covered ZnO Nanorods
- MOCVD法によるPbTiO_3ナノ島作製とその強誘電性
- 24pYE-6 圧電応答顕微鏡でみる分域像(強誘電体分域の測定法の新展開と新しい分域像,シンポジウム,領域10,誘電体,格子欠陥,X線・粒子線,フォノン物性)
- MOCVD法によるナノサイズ強誘電体の作製とその物性
- 19aXC-4 HAADF STEM法を用いたSrTiO_3(100)/PbTiO_3強誘電体薄膜の原子構造組成解析(X線・粒子線(電子線),領域10,誘導体,格子欠陥,X線・粒子線,フォノン物性)
- MOCVD法による強誘電体ナノ構造の形成とその物性(新型不揮発性メモリ)
- 29pXH-2 自己組織化による強誘電体PbTiO_3ナノ構造の形成と構造制御(領域10シンポジウム : ナノスケール構造を利用した物質創製-材料種の枠を超えて)(領域10)
- 圧電応答顕微鏡による強誘電体薄膜の観察と評価
- 21pXC-7 圧電応答顕微鏡による強誘電体薄膜の分極反転過程の観察と評価
- MOCVD法によるPb(Zr,Ti)O_3薄膜の低温成長と特性の改善(圧電デバイス・材料,強誘電体材料,有機エレクトロニクス,一般)
- MOCVD法によるPb(Zr,Ti)O_3極薄膜のエピタキシャル成長と電気的特性(物性,成膜,加工,プロセス : 強誘電体薄膜とデバイス応用)
- MOCVD法によるPb(Zr,Ti)0_3薄膜の低温成長と特性の改善(圧電デバイス・材料,強誘電体材料,有機エレクトロニクス,一般)
- I層にMgOを用いたMIS及びMFIS構造の作製とその評価
- Impact of 90゚-Domain Wall Motion in Pb(Zr_Ti_)O_3 Film on the Ferroelectricity Induced by an Applied Electric Field
- Thick Epitaxial Pb(Zr_,Ti_)O_3 Films Grown on (100)CaF_2 Substrates with Polar-Axis-Orientation
- Multiferroism at Room Temperature in BiFeO_3/BiCrO_3(111) Artificial Superlattices
- Ferroelectric Property of a- /b-Axis- Oriented Epitaxial Sr_Bi_Ta_2O_9 Thin Films Grown by Metalorganic Chemical Vapor Deposition : Electrical Properties of Condensed Matter
- Structural Modulation in Oxygen Deficient Epitaxial Bi_2Sr_2Ca_1Cu_2O_X Observed by X-ray Reciprocal Space Mapping
- Epitaxial Yttria-stabilized Zirconia (YSZ) Film Deposited on Si(100) Substrate by YAG Laser
- Bi_2Sr_2Ca_1Cu_2O_X Thin Film Deposition by Q-switched YAG Laser
- Microstructure and Electrical Properties of (Pb, La)(Zr. Ti)O_3 Films Crystallized from Amorphous State by TWO-Step Postdeposition Annealing
- Effects of Pt/SrRuO_3 Top Electrodes on Ferroelectric Properties of Epitaxial(Pb, La)(Zr, Ti)O_3 Thin Films
- MOCVD法によるPb(Zr,Ti)0_3薄膜の低温成長と特性の改善(圧電デバイス・材料,強誘電体材料,有機エレクトロニクス,一般)
- MOCVD法によるPb(Zr,Ti)O_3薄膜の低温成長と特性の改善(圧電デバイス・材料,強誘電体材料,有機エレクトロニクス,一般)
- MOCVD法によるPb(Zr,Ti)O_3薄膜の低温成長と核付けが及ぼす効果
- Twin-Free Epitaxial Films Lateral Relation between YSZ(111) and Si(111)
- Strong Dependence on Thickness of Room-Temperature Dielectric Constant of (100)-Oriented Pb(Mg_Nb_)O_3 Epitaxial Films Grown by Metal Organic Chemical Vapor Deposition
- Metalorganic Chemical Vapor Deposition of Epitaxial Perovskite SrIrO_3 Films on (100)SrTiO_3 Substrates
- Epitaxial Growth of β-FeSi_2 on Single Crystal Insulator
- Crystal Structure Analysis of Metalorganic Chemical Vapor Deposition-β-FeSi_2 Thin Film by X-ray Diffraction Measurement
- Thermal Stability of SrRuO_3 Bottom Electrode and Electric Property of Pb(Zr, Ti)O_3 Thin Film Deposited on SrRuO_3
- Growth of Epitaxial β-FeSi_2 Thin Film on Si(001) by Metal-Organic Chemical Vapor Deposition
- Effect of Strain in Epitaxially Grown SrRuO_3 Thin Films on Crystal Structure and Electric Properties
- Cation Distribution and Structural Instability in Bi_La_xTi_3O_
- Raman Spectroscopic Fingerprint of Ferroelectric SrBi_2Ta_2O_9 Thin Films: A Rapid Distinction Method for Fluorite and Pyrochlore Phases : Electrical Properties of Condensed Matter
- Measurement of MOS Leakage Conductance by Means of the Lateral Photovoltaic Effect
- Lateral Photovoltaic Effect in the Weakly Inverted and in the Depleted MOS Interface Layers
- Experimental Verification of the Small-Signal Theory of the Lateral Photovoltaic Effect in MOS Structures
- Local Epitaxial Growth of (103) One-Axis-Oriented SrBi_2Ta_2O_9 Thin Films Prepared at Low Deposition Temperature by Metalorganic Chemical Vapor Deposition and Their Electrical Properties
- Interface and Domain Structures of (116)-Oriented SrBi_2Ta_2O_9 Thin Film Epitaxially Grown on (110) SrTiO_3 Single Crystal
- Interface and Defect Structures of (001)-Oriented SrBi_2Ta_2O_9 Thin Film Epitaxially Grown on (001) SrTiO_3 Single Crystal
- Observations of Island Structures at the Initial Growth Stage of PbZr_xTi_O_3 Thin Films Prepared by Metalorganic Chemical Vapor Deposition
- Lateral Photovoltaic Measurements of Electrical Properties of SiAl:H/n-Type Si Structures
- Low Temperature Direct Crystallization of SrBi_2(Ta_Nb_x)_2O_9 Thin Films by Thermal Metalorganic Chemical Vapor Deposition and Their Properties
- Fill-Factor Calculation of Solar Cells Affected by Sheet Resistance of Surface Layer
- Pb(Zr, Ti)O_3薄膜を用いたMFIS構造における絶縁体膜の検討 : C-V 及び DLTS法による界面準位密度の測定
- Pb(Zr, Ti)O_3薄膜を用いたMFIS構造における絶縁体膜の検討 : C-V及びDLTS法による界面準位密度の測定
- MOCVD-Pb(Zr,Ti)O_3薄膜の電気的特性のグレインサイズ依存性
- MOCVD-Pb(Zr,Ti)O_3薄膜の電気的特性のグレインサイズ依存性
- Crystalline and Ferroelectric Properties of Pb(Zr, Ti)O_3 Thin Films Grown by Low-Temperature Metalorganic Chemical Vapor Deposition
- Epitaxial Growth and Ferroelectric Properties of the 20-nm-Thick Pb(Zr, Ti)O_3 Film on SrTiO_3(100) with an Atomically Flat Surface by Metalorganic Chemical Vapor Deposition
- Low-Temperature Fabrication of Ir/Pb(Zr,Ti)O_3/Ir Capacitors Solely by Metalorganic Chemical Vapor Deposition
- Influence of the Purity of Source Precursors on the Electrical Properties of Pb (Zr, Ti) O_3 Thin Films Prepared by Metalorganic Chemical Vapor Deposition
- Step Coverage Characteristics of Pb(Zr, Ti)O_3 Thin Films on Various Electrode Materials by Metalorganic Chemical Vapor Deposition
- Symptomatic Spinal Arachnoid Cyst Triggered by Seat Belt Injury : Case Report
- Role of Non-180° Domain Switching in Electrical Properties of Pb(Zr_, Ti)O_3 Thin Films
- Method of Distinguishing SrBi_2Ta_2O_9 Phase from Fluorite Phase Using X-Ray Diffraction Reciprocal Space Mapping
- Growth of β-FeSi_2 Thin Film on Si (111) by Metal-Organic Chemical Vapor Deposition : Surfaces, Interfaces, and Films
- Effect of Deposition Temperature and Composition on the Microstructure and Electrical Property of SrBi_2Ta_2O_9 Thin Films Prepared by Metalorganic Chemical Vapor Deposition
- Metalorganic Chemical Vapor Deposition of Epitaxial SrBi_2Ta_2O_9 Thin Films and Their Crystal Structure
- Preparation of SrBi_2Ta_2O_9 Thin Films by Metalorganic Chemical Vapor Deposition from Two New Liquid Organometallic Sources
- Precise Angle and Position Detection Utilizing Optical Interference on Metal-Oxide-Semiconductor-Type Position-Sensitive Detectors
- Chemical Composition of Al_2O_3/InP Metal-Insulator-Semiconductor Interfaces Improved by Plasma and Ultraviolet Oxidation
- A Position-Sensitive MOS Device Using Lateral Photovoltaic Effect
- Oxidation of Si by Microwave-Excited Oxygen-Plasma through Protective Al Coating
- High Conductive P-Type Films of Si_Al_x:H Fabricated by Co-Sputtering and Subsequent Annealing
- Dynamic Characteristics of the Lateral Photovoltaic Effect and Their Application to the Measurement of Junction Capacitance
- Application of Lateral Photovoltaic Effect to the Measurement of the Physical Quantities of P-N Junctions : Sheet Resistivity and Junction Conductance of N^+_2 Implanted Si
- Property Improvement of 75nm-thick Directly crystallized SrBi_2Ta_2O_9 Thin Films by Pulse-introduced Metalorganic Chemical Vapor Deposition at Low Temperature : Electrical Properties of Condensed Matter
- Preparation of BiFeO3 Thin Films on SrRuO3/SrTiO3(001) Substrate by Dual Ion Beam Sputtering
- Preparation and Characterization of SrBi_2(Ta_Nb_x)_2O_9 Thin Films by Metalorganic Chemical Vapor Deposition from Two Organometallic Source Bottles
- Barrier Height of InP Schottky Diodes Prepared by Means of UV Oxidation
- Fabrication and Characterization of Nd-Substituted Bi4Ti3O12 Thin Films with $a$- and $b$-Axis Orientations by High-Temperature Sputtering
- Synthesis of 3-Ethoxyisoxazole Derivatives and 3-Ethoxy-1H-pyrazole Derivatives from β-Oxo Thionoesters
- Efficient tests for mean structure in random effects models
- Synthesis of Mica Thin Film by Pulsed Laser Deposition
- Dependence of Crystalline Structure and Lattice Parameters on Film Thickness in PbTiO_3/Pt/MgO Epitaxial Structure
- Chemical Stability of SrBi_2Ta_2O_9 Thin Films Prepared by Metalorganic Chemical Vapor Deposition(Special Issue on Nonvolatile Memories)
- Low-Temperature Preparation of SrBi_2Ta_2O_9 Thin Films by Electron Cyclotron Resonance Plasma-Enhanced Metalorganic Chemical Vapor Deposition and Their Electrical Properties
- Direct Preparation of Crystalline SrBi_2(Ta_Nb_x)_2O_9 Thin Films by Thermal Metalorganic Chemical Vapor Deposition at Low Temperature
- Size Effects of Epitaxial and Polycrystalline Pb(Zr, Ti)O_3 Thin Films Grown by Metalorganic Chemical Vapor Deposition
- Central Nervous System Primitive Neuroectodermal Tumor of Spinal Cord Developing 20 Years After Curative Treatment of Pineal Tumor : Case Report
- Fabrication of Ir-Based Electrodes by Metal Organic Chemical Vapor Deposition Using Liquid Ir Precursors
- Characterization of (Bi3.25Nd0.75)Ti3O12 Thin Films with $a$- and $b$-Axis Orientations Deposited on Nb:TiO2 Substrates by High-Temperature Sputtering
- Control of Orientation of Pb(Zr, Ti)O_3 Thin Films Using PbTiO_3 Buffer Layer ( FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
- Effects of O_3 on Growth and Electrical Properties of Pb(Zr, Ti)O_3 Thin Films by Photoenhanced Metalorganic Chemical Vapor Deposition ( FERROELECTRIC MATERIALS AND THEIR APPLICATIONS)
- Structural and Ferroelectric Properties of Domain-Structure-Controlled BiFeO3 Thin Films Prepared by Dual-Ion-Beam Sputtering
- Spindle Cell Oncocytoma of the Adenohypophysis With Marked Hypervascularity : Case Report
- Piezoresponse Force Microscopy Observations of Switching Behavior in Pb(Zr,Ti)O3 Capacitors
- Synthesis of PbTiO3 Nanotubes by Metalorganic Chemical Vapor Deposition
- Piezo- and Ferroelectric Properties of Self-Assembled PbTiO3 Nanoisland Structures Fabricated by Metalorganic Chemical Vapor Deposition
- Growth of Perovskite (Bi, Ln)(Ni0.5Ti0.5)O3 Thin Films by RF Magnetron Sputtering
- Self-Assembled PbTiO3 Nano-Islands Prepared on SrTiO3 by Metalorganic Chemical Vapor Deposition
- Fabrication of Self-Assembled Au Nanodots and Their Applications to Ferroelectric Nanocapacitors
- Microstructures of Self-Assembled PbTiO3 Nanoislands Prepared by Metalorganic Chemical Vapor Deposition
- Epitaxial Growth and Ferroelectric Properties of PbTiO3 Nanoislands and Thin Films Grown on Single-Crystalline Pt Films