Growth of Perovskite (Bi, Ln)(Ni0.5Ti0.5)O3 Thin Films by RF Magnetron Sputtering

概要

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The epitaxial growth and formation mechanism of the partially La- and Nd-substituted perovskite structures, and the ferroelectric properties of bismuth lanthanoid nickel titanate [(Bi1-xLax)(Ni0.5Ti0.5)O3; BLNT and (Bi1-xNdx)(Ni0.5Ti0.5)O3; BNNT] based solid solution films deposited on Pt(100)/MgO(100) substrates by rf sputtering have been investigated using X-ray diffraction, transmission electron microscope, and polarization–electric field hysteresis loop measurements. BLNT samples at $x\geq 0.3$ and BNNT samples at $x\geq 0.4$ were confirmed to have a single-phase perovskite structure. This small difference is speculated that it is related to metal–oxygen bond dissociation energy. The sample substituted with La exhibited the best hysteresis loop at $x = 0.5$ with a remanent polarization of $P_{\text{r}} = 12$ μC/cm2 and the sample substituted by Nd exhibited the best hysteresis loop at $x = 0.4$ with a remanent polarization of $P_{\text{r}} = 2$ μC/cm2.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2007-10-30