Effects of Hot Isostatic Pressing on Polarization Fatigue Characteristics of Lead-Based Ferroelectric Thin Films Crystallized from the Amorphous State

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概要

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• Ferroelectric properties and memory characteristics of Pt/0.24Pb(Zn<SUB>1/3</SUB>Nb<SUB>2/3</SUB>)O<SUB>3</SUB>⋅0.384PbZrO<SUB>3</SUB>⋅0.376PbTiO<SUB>3</SUB> (PZNZT)/PbTiO<SUB>3</SUB>/Pt capacitors fabricated by crystallizing amorphous PZNZT films at 500°C for 1 h under high pressures of 1.0-176.5 MPa using hot isostatic pressing (HIP) are investigated. The relative permittivity decreased linearly with increasing HIP pressure. All the samples treated at pressures greater than 17.7 MPa completely showed fatigue-free characteristics even after up to 3×10<SUP>10</SUP> cycles. From dielectric measurements and cross-sectional highresolution TEM images, these fatigue-free behaviors may be caused by that several elongated amorphous areas oriented parallel to the substrate formed near the interface between the crystallized PZNZT layer and the PbTiO<SUB>3</SUB> (PT) seed layer, which would play an important role in restraining the diffusion of lead from the crystallized layer toward the PT seed layer.

• 社団法人 粉体粉末冶金協会の論文
• 2004-05-15

著者

• KOBUNE Masafumi

  Department of Material Science Chemistry, Graduate School of Engineering, University of Hyogo

• NISHIOKA Yusuke

  Department of Material Science Chemistry, Graduate School of Engineering, University of Hyogo

• YAZAWA Tetsuo

  Department of Material Science Chemistry, Graduate School of Engineering, University of Hyogo

• Yamaji Toru

  Department Of Material Science Chemistry Graduate School Of Engineering University Of Hyogo

• Yazawa Tetsuo

  Department Of Material Science Chemistry Graduate School Of Engineering University Of Hyogo

• Kobune M

  Dep. Of Materials Sci. And Chemistry Univ. Of Hyogo

• KOJIMA Shinichi

  Department of Material Science Engineering, Graduate School of Engineering, University of Hyogo

• Nishioka Yusuke

  Department Of Material Science Chemistry Graduate School Of Engineering University Of Hyogo

• Kojima Shinichi

  Department Of Material Science Engineering Graduate School Of Engineering University Of Hyogo

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