Fabrication of Self-Assembled Au Nanodots and Their Applications to Ferroelectric Nanocapacitors

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We report on the fabrication of self-assembled Au nanodots by high temperature annealing of Au thin films on SiO2, Pb(Zr,Ti)O3 (PZT) thin films and PbTiO3 nanodots and on their application to ferroelectric nanocapacitors as top electrodes. When Au films 5–20 nm thick were annealed at 500–900 °C, aggregation of Au thin films occurred, and isolated Au nanodots were formed. By annealing Au films 10 nm-thick at 500 °C for 10 min in air, Au nanodots with average lateral sizes of 82 and 122 nm were obtained on SiO2 and PZT, respectively. We have successfully measured piezoelectric hysteresis loops and current–voltage curves of nanocapacitors with Au nanodots with areas of $(1.8--7.3)\times 10^{4}$ nm2 as the top electrode using a scanning probe microscope. Au nanodots were also fabricated on PbTiO3 nanodots, demonstrating the possibility of fabricating ferroelectric nanocapacitors with self-assembled top electrodes and ferroelectrics.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2006-09-30