An MOS-Type Two-Dimensional PSD Using the AC Photovoltage Phase
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概要
- 論文の詳細を見る
A simulation and experiments have been conducted to develop a two-dimensional position-sensitive detector (PSD) from the previously presented MOS-type PSD. The ac photovoltage phase is used as a positional signal for this MOS-type PSD which requires no reverse-bias voltage, being similar to the Wallmark-type or floating-junction PSD. The simulation has been made using a RC network which equivalently represents the PSD; it has been shown that our PSD is useful for two-dimensional photosensing, admitting a light spot even of nonuniform intensity incident on its face. Experiments have demonstrated that the MOS-type two-dimensional PSD of Al–SiO2–Si has good linearity and electrically adjustable sensitivity. A resolution of 1 $\mu$m also has been demonstrated for the present PSD equipped with a simple phase-measuring system.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 1989-11-20
著者
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Matsuda Tetsuro
Department Of Electronics Himeji Institute Of Technology
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Kishino Seigo
Department of Electronics, Faculty of Engineering, Himeji Institute of Technology
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Niu Hirohiko
Department Of Electrical Electronic And Computer Engineering Graduate School Of Engineering Himeji I
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MATSUBARA Yoshihiro
Department of Data Management and Analyses, Translational Research Information Center
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Niu Hirohiko
Department of Electronics, Himeji Institute of Technology, Shosha, Himeji 671-22
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Yoshida Haruhiko
Department of Electronics, Himeji Institute of Technology, Shosha, Himeji 671-22
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Maeda Miki
Department of Electronics, Himeji Institute of Technology, Shosha, Himeji 671-22
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