Thermal Stability of a RuO_2 Electrode Prepared by DC Reactive Sputtering
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-01-15
著者
-
Hiratani M
Central Research Laboratory Hitachi Ltd.
-
Hiratani M
Central Research Laboratory Hitachi Ltd
-
Hiratani Masahiko
Central Research Laboratory Hitachi Ltd.
-
Kimura Shingo
Department Of Physics School Of General Education Iwate Medical University
-
Matsui Yasushi
Electronics Research Laboratory Corporate Research & Development Matsushita Electronics Corporat
-
Matsui Y
Assoc. Super‐advanced Electronics Technol. (aset) Kanagawa Jpn
-
Matsui Y
Nims Tsukuba Jpn
-
Kimura S
Ntt Photonics Lab. Kanagawa Jpn
-
MATSUI Yuichi
Central Research Laboratory, Hitachi, Ltd.
-
KIMURA Shinichiro
Central Research Laboratory, Hitachi, Ltd
-
Kimura S
Central Research Laboratory Hitachi Ltd.
-
Matsui Y
Central Research Laboratory Hitachi Ltd.
-
Muto Y
The Institute For Materials Research Tohoku University
-
Kimura Shinichiro
Central Research Laboratory Hitachi Ltd.
関連論文
- Substrate Dependence of Laser-Induced Damage Threshold of Scandium Oxide High-Reflector Coatings for UV Pulsed Laser
- Low-Temperature Growth of SiO_2 Thin Film by Photo-Induced Chemical Vapor Deposition Using Synchrotron Radiation
- Influence of Deposition Parameters on Laser Damage Threshold of 355-nm Scandium Oxide-Magnesium Fluoride High-Reflector Coatings
- Critical-Dimension Controllability of Chemically Amplified Resists for X-Ray Membrane Mask Fabrication
- Physiological and pharmacological characteristics of quisqualic acid-induced K^+-current response in the ganglion cells of Aplysia (アメフラシ神経節細胞におけるキスカル酸で引き起こされるK^+電流応答の生理学的薬理学的性質)
- Tetragonal High-T_c Superconductor in the System Ba_2Y(CuGa_x)_3O_
- Measurement of Time Lag of Electrical Breakdown in Polymethylmathacrylate under Highly Non-Uniform Field Using Nanosecond Pulse Voltage
- Electrical Breakdown at the Falling Edge of Rectangular Pulse Voltage Curve in Cyclohexane under Nonuniform Field Configuration
- Low-Temperature Annealing Effect on Bi-Sr-Ca-Cu-O Thin Films Prepared by Layer-by-Layer Deposition
- Interfacial Reaction of SrRuO_3 Prepared Directly on TiN
- Fabrication of Pd(Zr, Ti)O_3 Microscopic Capacitors by Electron Beam Lithography
- SrRuO_3 Thin Films Grown under Reduced Oxygen Pressure
- Orientation and Crystal Structure of SrTiO_3 Thin Films Prepared by Pulsed Laser Deposition
- Electrical Characteristics of HoBa_2Cu_3O_-La_Ba_Cu_3O_-HoBa_2Cu_3O_ Junctions with Planar-Type Structures
- Observation of the interaction of vortices with dislocations in a Nb superconductor by a cryo-Lorentz EM
- High-Resolution Transmission Electron Microscopy of Long-Period Structures of Various Phases in a Bi-Sr-Cu-O System
- Identification of the Superconducting Phase in the Nd-Ce-Sr-Cu-O System : Electrical Properties of Condensed Matter
- High-Resolution Electron Microscopy of Modulated Structure in 20 K Superconducting Oxide Bi_2Sr_2CuO_y : Electrical Properties of Condensed Matter
- High Resolution Electron Microscopy of Intergrowth and Modulated Structure in 100 K High-T_c Superconductor Bi_2 (Sr,Ca) _4Cu_3O_y : Electrical Properties of Condensed Matter
- Structure Analysis of the Bi_2(Sr,Ca)_3Cu_2O_ Superconducting Crystal Based on the Computer Simulation of HRTEM Images : Condensed Matter
- Twins and Intergrowth Defects in High-T_c Bi-Sr-Ca-Cu-O Superconductor Examined by High-Resolution Electron Microscopy : Electrical Properties of Condensed Matter
- On the 110 K Superconductor in the Bi-Ca-Sr-Cu-O System : Electrical Properties of Condensed Matter
- Possible Model of the Modulated Structure in High-T_c Superconductor in a Bi-Sr-Ca-Cu-O System Revealed by High-Resolution Electron Microscopy : Electrical Properties of Condensed Matter
- Identification of the Superconducting Phase in the Bi-Ca-Sr-Cu-O System : Electrical Properties of Condensed Matter
- High-Resolution Electron Microscopy of Modulated Structure in the New High-T_c superconductors of the Bi-Sr-Ca-Cu-O System : Electrical Properties of Condensed Matter
- High-Resolution Electron Microscopy of Planer Defects and Dislocation in Ba_2YCu_3O_y
- Electron Diffraction and Microscope Study of Ba-Nd-Cu-O Superconducting Oxides and Related Compounds
- Crystal Structure of the Superconductor Ba_Nd_Cu_3O_
- Electron Diffraction and Microscope Study of Radiation Damage in Ba_2YCu_3O_y
- Crystal Structure of Ba_La_Cu_3O_
- Preparation of (Ba, Sr)TiO_3 Thin Films by Chemical Vapor Deposition Using Liquid Sources
- Sub-100-nm Device Fabrication using Proximity X-Ray Lithography at Five Levels
- The Role of Rho and Rho-Dependent Kinase in Serotonin-Induced Contraction Observed in Bovine Middle Cerebral Artery
- Electrophysiological and Pharmacological Characterization of the K_ Channel Involved in the K^+-Current Responses to FSH and Adenosine in the Follicular Cells of Xenopus Oocyte
- Augmenting Effect of Serotonin on the Voltage-Dependent Ca^ Current and Subsequently Activated K^+ Current in Aplysia Neurons
- The small GTP-binding protein RhoA regulates serotonin-induced Na^+-current response in the neurons of Aplysia
- Blockade of ionotropic receptor responses by progesterone in the ganglion cells of Aplysia
- ATP suppresses the K^+ current responses to FSH and adenosine in the folliculer cells of Xenopus oocyte (Xenopus oocyte 卵胞細胞においてFSHおよびアデノシンで発生するK^+電流応答はATP受容体刺激によって抑制される)
- Influence of the Optical Purity on the Smectic Layer Thickness and the Transition Order in Enantiomeric Mixtures of an Antiferroelectric Liquid Crystal
- Mask Error Factor in Proximity X-Ray Lithography
- Optimum Phase Condition for Low-Contrast X-Ray Masks
- Measurement and Calculation of SiH_2 Radical Density in SiH_4 and Si_2H_6 Plasma for the Deposition of Hydrogenated Amorphous Silicon Thin Films
- Measurement of SiH_2 Densities in an RF-Discharge Silane Plasma Used in the Chemical Vapor Deporsition of Hydrogenated Amorphous Silicon Film
- Spectroscopic Measurements of the Production and the Transport of CH Radicals in a Methane Plasma Used for the CVD of a-C:H
- On the Reaction Kinetics in a Mercury Photosensitized CVD of a-Si:H Films
- Development of methanol sensor using a shear horizontal surface acoustic wave device for a direct methanol fuel cell
- High-Quality CVD/Thermal Stacked Gate Oxide Films with Hydrogen-Free CVD SiO_2 Formed in a SiCl_4-N_2O System
- Kinetic Study of Silicon Nitride Growth from Dichlorosilane and Ammonia
- First Order Paraelectric-Antiferroelectric Phase Transition in a Chiral Smectic Liquid Crystal of a Fluorine Containing Phenyl Pyrimidine Derivative
- Evaluation of Acid Diffusibility in a Chemical Amplification Resist Using Acidic Water-Soluble Film
- Development of temperature-control system for liquid droplet using surface Acoustic wave devices
- Use of a low refractive index prism in surface plasmon resonance biosensing
- Dependence of SPR sensor performance on prism material and its importance in biosensor
- I-3 Deposition of thin film based on SAW streaming(Device application (English session))
- P1-27 A study on SAW streaming phenomenon based on temperature measurement and observation of streaming in liquids(Poster session 1)
- Inversion Electron Mobility Affected by Phase Separation in High-Permittivity Gate Dielectrics
- High-Performance X-Ray Mask Fabrication Using TaGeN Absorber and Dummy Pattern Method for Sub-100nm Proximity X-Ray Lithography : Instrumentation, Measurement, and Fabrication Technology
- Suppression of Pattern Edge Roughness by Low Ion Strength Developer
- Properties of Ruthenium Films Prepared by Liquid Source Metalorganic Chemical Vapor Deposition Using Ru(EtCp)_2 with Tetrahydrofuran Solvent
- Evaluation of Overlay Accuracy for 100-nm Ground Rule in Proximity X-Ray Lithography
- Conformal Platinum Electrodes Prepared by Chemical Vapor Deposition Using a Liquid MeCpPtMe_3 Precursor in an Oxidizing Atmosphere
- Thermal Stability of a RuO_2 Electrode Prepared by DC Reactive Sputtering
- Hydrogen Reduction Properties of RuO_2 Electrodes
- Large-Capacity and High-Speed Magnetic Field Modulation Recording for 3.5" Magneto-Optical Disk Drive : Drive Technology
- Large-Capacity and High-Speed Magnetic Field Modulation Recording for 3.5" Magneto-Optical Disk Drive
- Performance of X-Ray Stepper for Next-Generation Lithography
- In-Situ Characterization of Si Surface Oxidation by High-Sensitivity Infrared Reflection Spectroscopic Method
- High-Sensitivity Infrared Characterization of Ultrathin SiO_2 Film by Grazing Internal Reflection Method
- A 500℃ fabrication process for MIM capacitors-based on a Ta_2O_5/Nb_2O_5 bilayer with high permittivity-for DRAM and SoC applications
- Effective Electron Mobility Reduced by Remote Charge Scattering in High-K Gate Stacks : Short Note
- Highly Oxidation-Resistant TiN Barrier Layers for Ferroelectric Capacitors
- Highly Oxidation-Resistant TiN Barrier Layers for Ferroelectric Capacitors
- Reaction Mechanism of Chemical Vapor Deposition Using Tetraethylorthosilicate and Ozone at Atmospheric Pressure
- High Output Power Operation of a 1.3 μm Gain-Coupled Distributed Feedback Laser with Narrow Spectral Linewidth
- New Structure of 1.3 μm Strained-Layer Multi-Quantum Well Complex-Coupled Distributed Feedback Lasers
- Novel Structure of 1.3μm Strained-Layer MQW Complex-Coupled DFB Lasers
- Analysis of Decomposed Layer Appearing on the Surface of Barium Strontium Titanate
- Effects of Post-Annealing Temperatures and Ambient Atmospheres on the Electrical Properties of Ultrathin (Ba, Sr) TiO_3 Capacitors
- Profile-Imaging of Wavy Cleavage Surface of Bi_2Sr_2CaCu_2O_y by High-Resolution Transmission Electron Microscopy
- Ruthenium Films Prepared by Liquid Source Metalorganic Chemical Vapor Deposition Using Ru(dpm)_3 Dissolved with Tetrahydrofuran Solvent : Surfaces, Interfaoes, and Films
- In Situ Observation of Etching Processes of Silica Glasses by Silicon Melts
- The Atomistic Origin of High Dielectric Constants of Ta_2O_5 Thin Film Deposited on Ru Electrodes
- Superconducting Thin Film of (Nd, Ce)_2CuO_
- Annealing of (Nd, Ca)_2CuO_4 Compounds under High Oxygen Pressure
- Fabrication of Diamond Membranes for X-Ray Masks by Hot-Filament Method
- Si Oxynitridation with Helicon-Wave Excited Nitrogen Plasma:Effects of Plasma Divergence and Concentration on Substrates
- Oxynitridation of Silicon Using Helicon-Wave Excited and Inductively-Coupled Nitrogen Plasma
- Preparation and Crystal Structures of Bi-Based Layered Oxides Including Fe
- T_c = 113 K Bi-Based Superconductor Prepared by Doping Fluorine
- Low-Temperature Electron Microscopy of a Bi_2(Sr, Ca)_3Cu_2O_x Superconductor
- Hetero-Epitaxial PbZr_Ti_O_3 Capacitors with Oxide Electrodes(Special Issue on Advanced Memory Devices Using High-ε and Ferroelectric Films)
- Oxygen Diffusion in Pt Botton Electrodes of Ferroelectric Capacitors
- Study of Surface Reaction Probability of CF_x Radicals by Trench Deposition Method
- Preparation of PbZrO_3 -PbTiO_3 -Pb(Mg_Nb_)O_3 Thick Films by Screen Printing
- Preparation of 0.92PbZrO_3-0.03PbTiO_3-0.05Pb(Zn_Nb_)O_3 Pyroelectric Thick Films by Screen Printing
- Development of (Pb,Nb)(Zr,Sn,Ti)O_3 Film Using a Sol-Get Process and Resulting Antiferroelectric Properties
- Thermal Stability of Pt Bottom Electrodes for Ferroelectric Capacitors
- New Biosensor Using Shear Horizontal Surface Acoustic Wave Device
- Inversion Electron Mobility Affected by Phase Separation in High-Permittivity Gate Dielectrics
- Regulation of dopamine-induced Na^+ current response by small G-protein RhoB or C and phospholipase D in Aplysia neurons