Interfacial Reaction of SrRuO_3 Prepared Directly on TiN
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1998-03-15
著者
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TAKAGI Kazumasa
Advanced Research Laboratory, Hitachi, Ltd.
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Takagi K
Advanced Research Laboratory Hitachi Ltd.
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Takagi Kazumasa
Advanced Research Laboratory Hitachi Ltd.
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Hiratani M
Central Research Laboratory Hitachi Ltd.
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Hiratani M
Central Research Laboratory Hitachi Ltd
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Hiratani Masahiko
Central Research Laboratory Hitachi Ltd.
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Takagi K
Univ. Tokyo Tokyo Jpn
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TAKAGI Kenshiro
Institute of Industrial Science, University of Tokyo
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OKAZAKI Choichiro
Central Research Laboratory, Hitachi, Ltd
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Okazaki Choichiro
Central Research Laboratory Hitachi Ltd
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Okazaki Choichiro
Faculty Of Engineering Chiba University
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Okazaki Choichiro
The Authors Are With Central Research Laboratory Hitachi Ltd.
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