Measurements of Power Absorption in a Modified Magnetron-type Discharge
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概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 1997-08-15
著者
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Takagi K
Univ. Tokyo Tokyo Jpn
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中川 吉郎
大阪市立大学
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Sato Noriyoshi
Department of Electronic Engineering, Tohoku University
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Nakagawa Y
Yamanashi Univ. Kofu Jpn
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NAKAGAWA Yukito
Anelva Corporation
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TSUKADA Tsutomu
Anelva Corporation
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WICKRAMANAYAKA Sunil
ANELVA Corporation
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TAKAGI Ken-ichi
ANELVA Corporation
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Sato N
Semiconductor Technology Development Group Semiconductor Solutions Network Company Sony Corporation
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Takagi K
Institute Of Industrial Science University Of Tokyo
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