Measurements of Power Absorption in a Modified Magnetron-type Discharge
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概要
- 論文の詳細を見る
The power absorption of a modified magnetron-type discharge that has a cylindrical shaped rf electrode is estimated using two different independent methods. The experiment was carried out for the rf power up to 500 W at a frequency of 13.56 MHz and for the pressure region of 0.5 mTorr to 10 mTorr. This magnetron-type plasma shows a higher power transfer efficiency (η) around 75% in the pressure region of 0.5 mTorr to 10 mTorr. With an increase of the pressure or applied rf power, the η tends to drop. For comparison, the η in the absence of the magnetic field is also estimated and reported. In the absence of the magnetic field, the η of the plasma source drops to about 30% at 2 mTorr.
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 1997-08-15
著者
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NAKAGAWA Yukito
Anelva Corporation
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WICKRAMANAYAKA Sunil
ANELVA Corporation
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TAKAGI Ken-ichi
ANELVA Corporation
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Tsukada Tsutomu
Anelva Corp.
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Sato Noriyoshi
Department Of Electrical Engineering Tohoku University
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Sato Noriyoshi
Department of Electronic Engineering, Tohoku University, Aoba-ku, Sendai 980-77, Japan
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Nakagawa Yukito
ANELVA Corporation, 3-5-8 Yotsuya, Fuchu-shi, Tokyo 183, Japan
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Tsukada Tsutomu
ANELVA Corporation, 3-5-8 Yotsuya, Fuchu-shi, Tokyo 183, Japan
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