Negative Hydrogen Ions Produced by Electron Temperature Control in an RF Plasma
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概要
- 論文の詳細を見る
The formation of negative hydrogen ions is investigated in a pure hydrogen RF plasma using a grid-method for electron temperature control. Using the grid method we produce both high and low electron temperature plasmas in the separated regions in the chamber, in which the electron temperature in the downstream region is controlled by the grid potential. The production rate of negative ions depends strongly on the grid potential. We observe efficient negative hydrogen ion production in the downstream region when the grid is negatively biased in the hydrogen pressure range of 2–5 mTorr.
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 1997-07-30
著者
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Iizuka Satoru
Department Of Electrical Engineering Graduate School Of Engineering Tohoku University
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Sato Noriyoshi
Department Of Electrical Engineering Tohoku University
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Takahashi Akira
Department Of Advanced Materials Science And Engineering Faculty Of Engineering Yamaguchi University
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Iizuka Satoru
Department of Electronic Engineering, Tohoku University, Sendai 980-77, Japan
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Sato Noriyoshi
Department of Electronic Engineering, Tohoku University, Sendai 980-77, Japan
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Kato Kohgi
Department of Electronic Engineering, Tohoku University, Sendai 980-77, Japan
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Kato Kohgi
Department of Chemical Engineering, Ichinoseki National College of Technology, Ichinoseki, Iwate 021-8511, Japan
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Nakagomi Koji
Department of Electronic Engineering, Tohoku University, Sendai 980-77, Japan
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