MgO Microparticle Deposition by Radio Frequency Impulse Discharge in a Small-Diameter Tube
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概要
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Inner wall surface coating has been performed in Ar/O2 microplasma produced by radio frequency (RF) impulse discharge using a Mg rod electrode in a narrow glass tube. We found formation of MgO microparticles, together with a relatively flat film consisting of MgO between these microparticles. The MgO film containing MgO microparticles was regarded as an efficient secondary electron emission surface for a low-voltage discharge. Effects of oxygen on the formation of MgO microparticles were investigated under different conditions of Ar/O2 mixing ratio. It was found that the MgO microparticles were produced even in the case of a low oxygen mixing ratio.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2009-02-25
著者
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Iizuka Satoru
Department Of Electrical Engineering Graduate School Of Engineering Tohoku University
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Iizuka Satoru
Department of Electrical Engineering, Tohoku University, Aza-Aoba 6-6-05, Aramaki, Aoba, Sendai 980-8579, Japan
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Muraoka Takumasa
Department of Electrical Engineering, Tohoku University, Aza-Aoba 6-6-05, Aramaki, Aoba, Sendai 980-8579, Japan
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