Production of a Large-Diameter Uniform Plasma by Modified Magnetron-Typed Radio Frequency Discharge
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概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 1997-07-01
著者
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Sato Noriyoshi
Department of Electronic Engineering, Tohoku University
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IIZUKA Satoru
Department of Electronic Engineering,Tohoku University
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Sato N
Semiconductor Technology Development Group Semiconductor Solutions Network Company Sony Corporation
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LI Yunlong
Department of Electronic Engineering, Tohoku University
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