Effects of Post-Annealing Temperatures and Ambient Atmospheres on the Electrical Properties of Ultrathin (Ba, Sr) TiO_3 Capacitors

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概要

• 論文の詳細を見る
• Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
• 1998-09-01

著者

• Hiratani M

  Central Research Laboratory Hitachi Ltd.

• Hiratani M

  Central Research Laboratory Hitachi Ltd

• Hiratani Masahiko

  Central Research Laboratory Hitachi Ltd.

• FUJISAKI Yoshihisa

  Central Research Laboratory, Hitachi Ltd.

• Matsui Yasushi

  Electronics Research Laboratory Corporate Research & Development Matsushita Electronics Corporat

• Matsui Y

  Assoc. Super‐advanced Electronics Technol. (aset) Kanagawa Jpn

• Matsui Y

  Nims Tsukuba Jpn

• MATSUI Yuichi

  Central Research Laboratory, Hitachi, Ltd.

• SHIMAMOTO Yasuhiro

  Central Research Laboratory, Hitachi, Ltd.

• Matsui Y

  Central Research Laboratory Hitachi Ltd.

• Muto Y

  The Institute For Materials Research Tohoku University

• Miura H

  Hitachi Ltd. Tsuchiura‐shi Jpn

• Miki Hiroshi

  Central Research Laboratory Hitachi Ltd.

• Shimamoto Yasuhiro

  Central Research Laboratory Hitachi Ltd.

• CHEN Po-ching

  central Research Laboratory, Hitachi, Ltd.

• Chen Po-ching

  Central Research Laboratory Hitachi Ltd.

• Shimamoto Y

  Hitachi Ltd. Tokyo Jpn

• Fujisaki Y

  R&d Association For Future Electron Devices

• Fujisaki Yoshihisa

  Central Research Laboratory Hitachi Limited

• Miki Hiroshi

  Central Research Laboratory Hitachi Limited

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