Miura H | Hitachi Ltd. Tsuchiura‐shi Jpn
スポンサーリンク
概要
関連著者
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Miura H
Hitachi Ltd. Tsuchiura‐shi Jpn
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Miki Hiroshi
Central Research Laboratory Hitachi Limited
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MIKI Hiroshi
Department of Pathology, Kagawa Medical University
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Fujisaki Y
R&d Association For Future Electron Devices
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Miki Hiroshi
Central Research Laboratory Hitachi Ltd.
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Fujisaki Yoshihisa
Central Research Laboratory Hitachi Limited
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Fujisaki Yoshihisa
R&D Association for Future Electron Devices
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FUJISAKI Yoshihisa
Central Research Laboratory, Hitachi Ltd.
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Kushida‐abdelghafar K
The Authors Are With Central Research Laboratory Hitachi Ltd.
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MIURA Hideo
Mechanical Engineering Research Laboratory, Hitachi, Ltd.
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Matsui Yasushi
Electronics Research Laboratory Corporate Research & Development Matsushita Electronics Corporat
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MATSUI Yuichi
Central Research Laboratory, Hitachi, Ltd.
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Muto Y
The Institute For Materials Research Tohoku University
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Miura Hideo
Mechanical Engineering Research Laboratory Hitachi Lid.
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Ohta H
Okayama Univ. Dental School Okayama Jpn
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TORII Kazuyoshi
Central Research Laboratory, Hitachi, Ltd.
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Torii K
Central Research Laboratory Hitachi Ltd.
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Torii Kazuyoshi
Central Research Laboratory Hitachi Lid.
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Torii K
Semiconductor Leading Edge Technol. Inc. Tsukuba-shi Jpn
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Ohta H
Ibaraki Univ. Coll. Agriculture Ibaraki Jpn
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OHTA Hiroyuki
Mechanical Engineering Research Laboratory, Hitachi, Ltd.
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Ohta Hiroyuki
Mechanical Engineering Research Laboratory Hitachi Ltd.
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Hiratani M
Central Research Laboratory Hitachi Ltd.
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Hiratani M
Central Research Laboratory Hitachi Ltd
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Hiratani Masahiko
Central Research Laboratory Hitachi Ltd.
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Saito Naoto
Mechanical Engineering Research Laboratory Hitachi Ltd.
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KUSHIDA Keiko
Central Research Lab., Hitachi, Lid.
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Okamoto Noriaki
Mechanical Engineering Research Laboratory Hitachi Ltd.
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Okamoto Noriaki
Mechanical Engineering Resarch Laboratory Hitachi Ltd.
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Kushida K
Hitachi Ltd. Tokyo Jpn
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Kushida-abdelghafar Keiko
Central Research Laboratory Hitachi Limited
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Shimamoto Yasuhiro
Central Research Laboratory Hitachi Ltd.
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Shimamoto Y
Hitachi Ltd. Tokyo Jpn
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IKEDA Shuji
Semiconductor & Integrated Circuits Division, Hitachi Ltd.
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Ikeda Shuji
Semiconductor And Integrated Circuit Division Hitachi Ltd.
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Ikeda Shuji
Semiconductor & Integrated Circuits Div. Hitachi Ltd.
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ISHITSUKA Norio
Mechanical Engineering Research Laboratory, Hitachi, Ltd.
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Matsui Y
Assoc. Super‐advanced Electronics Technol. (aset) Kanagawa Jpn
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Matsui Y
Nims Tsukuba Jpn
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SHIMAMOTO Yasuhiro
Central Research Laboratory, Hitachi, Ltd.
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Matsui Y
Central Research Laboratory Hitachi Ltd.
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Suga Mitsuo
Central Research Laboratory Hitachi Ltd.
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Yano Fumiko
Central Research Laboratory Hitachi Limited
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Takata Keiji
Advanced Research Laboratory, Hitachi Ltd.
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Takata K
Hitachi Ltd. Saitama Jpn
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Takata Keiji
Advanced Research Laboratory Hitachi Ltd.
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Takata Keiji
Advanced Research Laboratory Hitachi Ltd
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CHEN Po-ching
central Research Laboratory, Hitachi, Ltd.
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FUJISAKI Yoshihisa
The authors are with Central Research Laboratory, Hitachi Ltd.
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KUSHIDA-ABDELGHAFAR Keiko
The authors are with Central Research Laboratory, Hitachi Ltd.
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MIKI Hiroshi
The authors are with Central Research Laboratory, Hitachi Ltd.
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SHIMAMOTO Yasuhiro
The authors are with Central Research Laboratory, Hitachi Ltd.
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Chen Po-ching
Central Research Laboratory Hitachi Ltd.
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HASHIMOTO Chiemi
Semiconductor & Integrated Circuits Div., Hitachi, Ltd.,
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SAKATA Hiroshi
Mechanical Engineering Research Laboratory,Hitachi Ltd.,
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Ishitsuka N
Hitachi Ltd. Ibaraki Jpn
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Ishitsuka Norio
Mechanical Engineering Research Laboratory Hitachi Ltd.
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Hashimoto Chiemi
Semiconductor & Integrated Circuits Div. Hitachi Ltd.
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KUMAGAI Yukihiro
Mechanical Engineering Research Laboratory, Hitachi, Lid.
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Kumagai Yukihiro
Mechanical Engineering Research Laboratory Hitachi Lid.
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Sakata Hiroshi
Mechanical Engineering Research Laboratory Hitachi Ltd.
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Kumagai Yuki
Mechanical Engineering Research Laboratory, Hitachi, Lid.
著作論文
- Strain Imaging of Lead-Zirconate-Titanate Thin Film by Tunneling Acoustic Microscopy
- Highly Oxidation-Resistant TiN Barrier Layers for Ferroelectric Capacitors
- Hydrogen-related Degradation and Recovery Phenomena in Pb(Zr,Ti)O_3 Capacitors with a Platinum Electrode
- Highly Oxidation-Resistant TiN Barrier Layers for Ferroelectric Capacitors
- Effects of Post-Annealing Temperatures and Ambient Atmospheres on the Electrical Properties of Ultrathin (Ba, Sr) TiO_3 Capacitors
- Improved Resistance Against the Reductive Ambient Annealing of Ferroelectric Pb(Zr, Ti)O_3 Thin Film Capacitors with IrO_2 Top Electrode(Special Issue on Advanced Memory Devices Using High-ε and Ferroelectric Films)
- IrO_2/Pb(Zr_xTi_)O_3(PZT)/Pt Ferroelectric Thin-Film Capacitors Resistant to Hydrogen-Annealing Damage
- Stress Analysis of Transistor Structures Considering the Internal Stress of Thin Films
- Oxygen Diffusion in Pt Botton Electrodes of Ferroelectric Capacitors
- Stress Analysis in Silicon Substrates during Thermal Oxidation
- Residual Stress in Silicon Substrate with Shallow Trenches on Surface after Local Thermal Oxidation
- Residual Stress Measurement in Silicon Substrates after Thermal Oxidation
- Thermal Stability of Pt Bottom Electrodes for Ferroelectric Capacitors