MIURA Hideo | Mechanical Engineering Research Laboratory, Hitachi, Ltd.
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概要
関連著者
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MIURA Hideo
Mechanical Engineering Research Laboratory, Hitachi, Ltd.
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Miura Hideo
Mechanical Engineering Research Laboratory Hitachi Lid.
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Miura H
Hitachi Ltd. Tsuchiura‐shi Jpn
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Ohta Hiroyuki
Mechanical Engineering Research Laboratory Hitachi Ltd.
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Ohta H
Okayama Univ. Dental School Okayama Jpn
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MIKI Hiroshi
Department of Pathology, Kagawa Medical University
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Ohta H
Ibaraki Univ. Coll. Agriculture Ibaraki Jpn
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OHTA Hiroyuki
Mechanical Engineering Research Laboratory, Hitachi, Ltd.
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Miki Hiroshi
Central Research Laboratory Hitachi Limited
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Saito Naoto
Mechanical Engineering Research Laboratory Hitachi Ltd.
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Okamoto Noriaki
Mechanical Engineering Research Laboratory Hitachi Ltd.
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Okamoto Noriaki
Mechanical Engineering Resarch Laboratory Hitachi Ltd.
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IKEDA Shuji
Semiconductor & Integrated Circuits Division, Hitachi Ltd.
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ISHITSUKA Norio
Mechanical Engineering Research Laboratory, Hitachi, Ltd.
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Ishitsuka Norio
Mechanical Engineering Research Laboratory Hitachi Ltd.
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Hiratani M
Central Research Laboratory Hitachi Ltd.
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Hiratani M
Central Research Laboratory Hitachi Ltd
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Hiratani Masahiko
Central Research Laboratory Hitachi Ltd.
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SASAKI Naoya
Mechanical Engineering Research Laboratory, Hitachi, Ltd.
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MORIYA Hiroshi
Mechanical Engineering Research Laboratory, Hitachi, Ltd.
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Iwasaki Tomio
Mechanical Engineering Res. Lab. Hitachi Ltd.
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Moriya Hiroshi
Mechanical Engineering Research Laboratory Hitachi Ltd.
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Ikeda Shuji
Semiconductor And Integrated Circuit Division Hitachi Ltd.
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Ikeda Shuji
Semiconductor And Integrated Circuits Div. Hitachi Ltd.
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Ikeda Shuji
Semiconductor & Integrated Circuits Div. Hitachi Ltd.
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Matsui Yasushi
Electronics Research Laboratory Corporate Research & Development Matsushita Electronics Corporat
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MATSUI Yuichi
Central Research Laboratory, Hitachi, Ltd.
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Muto Y
The Institute For Materials Research Tohoku University
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Sasaki Naoya
Mechanical Engineering Research Laboratory Hitachi Ltd.
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Moriya H
Hitachi Ltd. Ibaraki Jpn
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Kitano Makoto
Mechanical Engineering Research Laboratory Hitachi Ltd.
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HASHIMOTO Chiemi
Semiconductor & Integrated Circuits Div., Hitachi, Ltd.,
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SAKATA Hiroshi
Mechanical Engineering Research Laboratory,Hitachi Ltd.,
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Ishitsuka N
Hitachi Ltd. Ibaraki Jpn
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Hashimoto Chiemi
Semiconductor & Integrated Circuits Div. Hitachi Ltd.
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Fujisaki Y
R&d Association For Future Electron Devices
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Fujisaki Yoshihisa
Central Research Laboratory Hitachi Limited
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KUMAGAI Yukihiro
Mechanical Engineering Research Laboratory, Hitachi, Lid.
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Kumagai Yukihiro
Mechanical Engineering Research Laboratory Hitachi Lid.
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Sakata Hiroshi
Mechanical Engineering Research Laboratory Hitachi Ltd.
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Miura Hideo
Mechanical Engineering Research Laboratory Hitachi Ltd.
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Fujisaki Yoshihisa
R&D Association for Future Electron Devices
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Kumagai Yuki
Mechanical Engineering Research Laboratory, Hitachi, Lid.
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IWASAKI Tomio
Mechanical Eng. Res. Laboratory, Hitachi, Ltd.
著作論文
- Molecular Dynamics Study of Stress Effects on Raman Frequencies of Crystalline Silicon
- Mechanical Stress Simulation for Highly Reliable Deep-Submicron Devices (Special Issue on TCAD for Semiconductor Industries)
- Stress Analysis of Transistor Structures Considering the Internal Stress of Thin Films
- Stress Analysis in Silicon Substrates during Thermal Oxidation
- Residual Stress in Silicon Substrate with Shallow Trenches on Surface after Local Thermal Oxidation
- Residual Stress Measurement in Silicon Substrates after Thermal Oxidation
- Thermal Stability of Pt Bottom Electrodes for Ferroelectric Capacitors
- METHOD FOR PREDICTION OF DISLOCATION GENERATION IN SILICON SUBSTRATES OF SEMICONDUCTOR DEVICES