Miura Hideo | Mechanical Engineering Research Laboratory Hitachi Lid.

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著作論文

Molecular Dynamics Study of Stress Effects on Raman Frequencies of Crystalline Silicon
Mechanical Stress Simulation for Highly Reliable Deep-Submicron Devices (Special Issue on TCAD for Semiconductor Industries)
Stress Analysis of Transistor Structures Considering the Internal Stress of Thin Films
Stress Analysis in Silicon Substrates during Thermal Oxidation
Residual Stress in Silicon Substrate with Shallow Trenches on Surface after Local Thermal Oxidation
Residual Stress Measurement in Silicon Substrates after Thermal Oxidation
Thermal Stability of Pt Bottom Electrodes for Ferroelectric Capacitors
METHOD FOR PREDICTION OF DISLOCATION GENERATION IN SILICON SUBSTRATES OF SEMICONDUCTOR DEVICES
Effect of Phosphorus Doping on Crystallization-Induced Stress of Silicon Thin Films

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