OHTA Hiroyuki | Mechanical Engineering Research Laboratory, Hitachi, Ltd.

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概要

• OHTA HIROYUKIの詳細を見る
• 同名の論文著者
• Mechanical Engineering Research Laboratory, Hitachi, Ltd.の論文著者

関連著者

• OHTA Hiroyuki

  Mechanical Engineering Research Laboratory, Hitachi, Ltd.

• Ohta Hiroyuki

  Mechanical Engineering Research Laboratory Hitachi Ltd.

• Ohta H

  Okayama Univ. Dental School Okayama Jpn

• MIURA Hideo

  Mechanical Engineering Research Laboratory, Hitachi, Ltd.

• MIKI Hiroshi

  Department of Pathology, Kagawa Medical University

• Ohta H

  Ibaraki Univ. Coll. Agriculture Ibaraki Jpn

• Miura H

  Hitachi Ltd. Tsuchiura‐shi Jpn

• Miura Hideo

  Mechanical Engineering Research Laboratory Hitachi Lid.

• Miki Hiroshi

  Central Research Laboratory Hitachi Limited

• Saito Naoto

  Mechanical Engineering Research Laboratory Hitachi Ltd.

• Okamoto Noriaki

  Mechanical Engineering Research Laboratory Hitachi Ltd.

• Okamoto Noriaki

  Mechanical Engineering Resarch Laboratory Hitachi Ltd.

• IKEDA Shuji

  Semiconductor & Integrated Circuits Division, Hitachi Ltd.

• SHIMIZU Akihiro

  Hitachi ULSI Engineering Corp.

• Ikeda Shuji

  Semiconductor And Integrated Circuit Division Hitachi Ltd.

• Ikeda Shuji

  Semiconductor & Integrated Circuits Div. Hitachi Ltd.

• ISHITSUKA Norio

  Mechanical Engineering Research Laboratory, Hitachi, Ltd.

• HASHIMOTO Chiemi

  Semiconductor & Integrated Circuits Div., Hitachi, Ltd.,

• SAKATA Hiroshi

  Mechanical Engineering Research Laboratory,Hitachi Ltd.,

• Ishitsuka N

  Hitachi Ltd. Ibaraki Jpn

• Ishitsuka Norio

  Mechanical Engineering Research Laboratory Hitachi Ltd.

• Hashimoto Chiemi

  Semiconductor & Integrated Circuits Div. Hitachi Ltd.

• Kumagai Yukihiro

  Mechanical Engineering Research Laboratory Hitachi Lid.

• Kumagai Yukihiro

  Mechanical Engineering Research Laboratory Hitachi Ltd.

• MIURA HIDEO

  Tohoku University

• Sakata Hiroshi

  Mechanical Engineering Research Laboratory Hitachi Ltd.

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著作論文

• Stress Analysis of Transistor Structures Considering the Internal Stress of Thin Films
• Stress Analysis in Silicon Substrates during Thermal Oxidation
• Residual Stress in Silicon Substrate with Shallow Trenches on Surface after Local Thermal Oxidation
• Residual Stress Measurement in Silicon Substrates after Thermal Oxidation
• B24-072 STRESS-OPTIMIZATION DESIGN OF A THIN-FILM SEMICONDUCTOR DEVICE

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