IrO_2/Pb (Zr_xTi_<1-x>)O_3(PZT)/Pt Ferroelectric Thin-Film Capacitors Resistant to an Interlayer-Dielectric-Deposition Process
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1998-07-01
著者
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FUJISAKI Yoshihisa
Central Research Laboratory, Hitachi Ltd.
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Kushida-abdelghafar Keiko
Central Research Laboratory Hitachi Limited
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Fujisaki Yoshihisa
Central Research Laboratory Hitachi Limited
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