Nondestruetive Characterization of Deep Levels in Semi-Insulating GaAs Wafers Using Microwave Impedance Measurement
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1986-11-20
著者
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Takano Y
Department Of Pharmacology Faculty Of Pharmaceutical Sciences Fukuoka University
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Takano Yukio
Department Of Physiology And Pharmacology Faculty Of Pharmaceutical Sciences Fukuoka University
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Takano Yukio
Central Research Laboratory Hitachi Ltd.
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Takano Yukio
Central Research Laboratory
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FUJISAKI Yoshihisa
Central Research Laboratory, Hitachi Ltd.
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ISHIBA Tsutomu
Central Research Laboratory, Hitachi Ltd.
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Ishiba T
Central Research Laboratory Hitachi Ltd.
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Ishiba Tsutomu
Central Research Laboratory Hitachi Ltd.
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Fujisaki Y
R&d Association For Future Electron Devices
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Fujisaki Yoshihisa
Central Research Laboratory Hitachi Limited
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Fujisaki Yoshihisa
R&D Association for Future Electron Devices
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