Fatigueless Ferroelectric Capacitors with Ruthenium Bottom and Top Electrodes Formed by Metalorganic Chemical Vapor Deposition

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概要

• 論文の詳細を見る

• Ferroelectric Ru/Bi4-xLaxTi3O12/Ru capacitors were fabricated by combining metalorganic chemical vapor deposition (MOCVD) of top and bottom Ru electrodes and spin-coating of the ferroelectric film. After optimization of the deposition conditions, good ferroelectric properties ($2P_{\text{r}}=18$ μC/cm2, $P_{\text{r}}$: remanent polarization) and low leakage current density ($2\times 10^{-6}$ A/cm2) were achieved. No significant fatigue phenomenon (decrease of $P_{\text{r}}$) was observed even after 1010 switching cycles.

• Japan Society of Applied Physicsの論文
• 2005-03-10

著者

• Kuroiwa Takeharu

  Advanced Technology R&d Center Mitsubishi Electric Corporation

• FURUKAWA Taisuke

  Advanced Technology R&D Center, Mitsubishi Electric Corporation

• Ishiwara Hiroshi

  Interdisciplinary Graduate School Of Science And Engineering Tokyo Institute Of Technology

• Fujisaki Yoshihisa

  Central Research Laboratory Hitachi Limited

• Sato Takehiko

  Advanced Technology R&D Center, Mitsubishi Electric Co., 8-1-1 Tsukaguchi-Honmachi, Amagasaki, Hyogo 661-8661, Japan

• Kuroiwa Takeharu

  Advanced Technology R&D Center, Mitsubishi Electric Co., 8-1-1 Tsukaguchi-Honmachi, Amagasaki, Hyogo 661-8661, Japan

• Fujisaki Yoshihisa

  Central Research Laboratory, Hitachi Ltd., 1-280 Higashi-koigakubo, Kokubunji, Tokyo 185-8601, Japan

• Furukawa Taisuke

  Advanced Technology R&D Center, Mitsubishi Electric Co., 8-1-1 Tsukaguchi-Honmachi, Amagasaki, Hyogo 661-8661, Japan

• Ishiwara Hiroshi

  Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology, 4259 Nagatsuta-cho, Midori-ku, Yokohama, Kanagawa 226-8503, Japan

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