Comparison of Ferroelectric and Insulating Properties of Mn-Doped BiFeO3 Films Formed on Pt, SrRuO3/Pt, and LaNiO3/Pt Bottom Electrodes by Radio-Frequency Sputtering

概要

論文の詳細を見る
Mn-doped BiFeO3 (BFMO) films were deposited on Pt(111), SrRuO3(SRO)/Pt(111) and LaNiO3(LNO)/Pt(111) bottom electrodes by radio-frequency (RF) sputtering. $\langle 111\rangle$ and $\langle 100\rangle$-oriented BFMO films were formed on the SRO/Pt and LNO/Pt bottom electrodes, respectively. The remanent polarization ($P_{\text{r}}$) in a $\langle 111\rangle$-oriented BFMO film on the SRO/Pt bottom electrode was 80 μC/cm2, which was twice larger than that in a $\langle 100\rangle$-oriented BFMO film on the LNO/Pt bottom electrode. However, the coercive field ($E_{\text{c}}$) of the BFMO film on LNO/Pt bottom electrode (242 kV/cm) was much lower than that of the BFMO film on SRO/Pt (407 kV/cm). Furthermore, improved leakage current, breakdown field, and fatigue endurance characteristics were obtained in the $\langle 100\rangle$-oriented BFMO film on LNO/Pt.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2011-05-25