Preparation of SrBi_2Ta_2O_9 Thin Films by Liquid-Delivery Metalorganic Chemical Vapor Deposition using a Double Alcoholate Source

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1999-11-15

著者

• FUNAKUBO Hiroshi

  Interdisciplinary Graduate School of Science and Engineering, Tokyo Institute of Technology

• TOKUMITSU Eisuke

  Precision and Intelligence Laboratory, Tokyo Institute of Technology

• ISHIWARA Hiroshi

  Frontier Collaborative Research Center, Tokyo Institute of Technology

• Funakubo Hiroshi

  Interdisciplinary Graduate School Of Science And Engineering Tokyo Institute Of Technology

• Jimbo T

  Ulvac Inc. Shizuoka Jpn

• JIMBO Takehito

  Frontier Collaborative Research Center, Tokyo Institute of Technology

• SANO Haruyuki

  Frontier Collaborative Research Center, Tokyo Institute of Technology

• TAKAHASHI Yuji

  Precision and Intelligence Laboratory, Tokyo Institute of Technology

• Sano Haruyuki

  Frontier Collaborative Research Center Tokyo Institute Of Technology

• Tokumitsu Eisuke

  Precision And Intelligence Laboratory Tokyo Institute Of Technology

• Ishiwara Hiroshi

  Frontier Collaborative Research Center Tokyo Insitute Of Technology

• Takahashi Yuji

  Precision And Intelligence Laboratory Tokyo Institute Of Technology

• Ishiwara Hiroshi

  Frontier Collaborative Research Center Tokyo Institute Of Technology:precision And Intelligence Labo

• Tokumitsu Eisuke

  Precision & Intelligence Laboratory, Tokyo Institute of Technology,

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